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Stress relaxation-induced phase transformation in chromium nitride films

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Journal of Materials Science Letters

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References

  1. E. J. Markel and M. E. Leaphart II, in “Encyclopedia of Chemical Technology,” 4th ed. edited by M. H. Grant (JohnWiley and Sons, New York, 1996) Vol. 19, p. 112.

    Google Scholar 

  2. F. D. Lai and J. K. Wu, Surf. Coat. Technol. 64 (1994) 53.

    Google Scholar 

  3. C. Héau, R. Y. Fillit, F. Vaux and F. Pascaretti, ibid. 120/121 (1999) 200.

    Google Scholar 

  4. J. Almer, M. Odén, L. Hultman and G. Håkansson, J. Vac. Sci. Technol. A 18 (2000) 121.

    Google Scholar 

  5. W. P. Hsieh, W. C. Wang, C. C. Wang and F. S. Shieu, ibid. 19 (2001) 2235.

    Google Scholar 

  6. F.-H. Lu and H.-Y. Chen, Thin Solid Films 398/399 (2001) 368.

    Google Scholar 

  7. G. G. Stoney, Proc. R. Soc. Lond. Ser. A 82 (1909) 172.

    Google Scholar 

  8. S. Barin and G. Platzki, “Thermochemical Data of Pure Substances,” 3th ed. (VCH, New York, 1995) Vol. 1, p. 567.

    Google Scholar 

  9. J. A. Sue, A. J. Perry and J. Wetter, Surf. Coat. Technol. 68/69 (1994) 126.

    Google Scholar 

  10. W. Herr and E. Broszeit, ibid. 97 (1997) 335.

    Google Scholar 

  11. M. Odén, C. Ericsson, G. Håkansson and H. Ljungcrantz, ibid. 144 (1999) 39.

    Google Scholar 

  12. C. Nouveau, M. A. Djouadi, O. Banakh, R. Sanjinés and F. Lévy, Thin Solid Films 398/399 (2001) 490.

    Google Scholar 

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Authors and Affiliations

  1. Department of Materials Engineering, National Chung Hsing University, 250 Kuo Kuang Road, Taichung, 402, Taiwan, Republic of China

    Hong-Ying Chen & Fu-Hsing Lu

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  1. Hong-Ying Chen
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  2. Fu-Hsing Lu
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Correspondence to Fu-Hsing Lu.

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Chen, HY., Lu, FH. Stress relaxation-induced phase transformation in chromium nitride films. Journal of Materials Science Letters 22, 817–819 (2003). https://doi.org/10.1023/A:1023912225718

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  • DOI: https://doi.org/10.1023/A:1023912225718

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