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Investigation of Parameters of the Ion Beam Formed in Crossed Electric and Magnetic Fields

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Journal of Engineering Physics and Thermophysics Aims and scope

Abstract

The results of experimental investigations of the characteristics of the positive ion beam formed in an ion‐plasma system with discharge generation in crossed electric and magnetic fields are presented. The conditions for the discharge formation and the specific features of the developed configuration of the discharge unit are described. It is shown that such discharge systems are capable of forming broad low‐energy ion beams and can be used successfully in various fields of thin‐film technology.

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Authors and Affiliations

  1. Belarusian State University of Informatics and Radioelectronics, Minsk

    D. A. Kotov & A. P. Dostanko

Authors
  1. D. A. Kotov
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  2. A. P. Dostanko
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Kotov, D.A., Dostanko, A.P. Investigation of Parameters of the Ion Beam Formed in Crossed Electric and Magnetic Fields. Journal of Engineering Physics and Thermophysics 76, 468–472 (2003). https://doi.org/10.1023/A:1023654629308

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  • DOI: https://doi.org/10.1023/A:1023654629308

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