Abstract
The chemical composition of the surface of porous silicon synthesized on weakly doped silicon of the n type of conductivity (KÉF-20) with the crystallographic orientation (100) (100) in aqueous and aqueous-alcoholic electrolytes with different HF concentrations has been analyzed by IR spectroscopy.
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Baranov, I.L., Tabulina, L.V., Stanovaya, L.S. et al. Chemical Composition of Porous Silicon Formed in Aqueous and Aqueous-Alcoholic Electrolytes, According to the IR Spectroscopy Data. Journal of Applied Spectroscopy 70, 151–154 (2003). https://doi.org/10.1023/A:1023297130699
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DOI: https://doi.org/10.1023/A:1023297130699