Abstract
Three sets of titanium oxide layers with different oxygen content were prepared by DC pulsed reactive magnetron sputtering. The layers were characterised by their thickness, conductivity, refractive index, band-gap and flat band potential. The photoelectric and photocatalytic activities of the layers irradiated by Xe discharge lamp were tested in NaOH and phenol water solution, respectively. Rather high activity of prepared layers was found; no expressive activity increase was, however, observed in contrary to the expectation connected with suboxide forms of TiO x .
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References
D. F. Ollis and H. E. El-Akabi (Editors): Photocatalytic Purification of Water and Air. Elsevier, Amsterdam, 1993.
M. A. Butler: J. Mater. Sci. 15 (1980)1.
H. P. Maruska and A. K. Grosh: Solar Energy 20 (1978)443.
M. Mikula, V. Brezová, M. Čeppan, L. Pach, and L. Karpinsky: J. Mater. Sci. Lett. 14 (1995)615.
D. Buc, I. Hotovy, F. Mika, A. Kromka, and R. Srnánek, in Proc. Int. Conf. on Advanced Semiconductor Devices and Microsystems, Smolenice 1996, FEI STU Bratislava (Slovakia), 1996, p. 55.
T. Larsson, H. Blom, C. Nender, and S. Berg: J. Vacuum Sci. Technol. A 6 (1988) 1832.
S. Schiller, K. Goedicke, J. Reschke, V. Kirchhoff, S. Schneider, and F. Milde: Surf. Coat. Technol. 61 (1993)331.
K. G. Geraghty and L. F. Donaghey: Thin Solid Films 40 (1977)375.
D. BÚc, A. Kromka, I. Hotovy, I. Červeň: J. Electrical Engineering 47 (1996)265.
M. Mikula, J. Blecha, M. Čeppan, J. Panák: Czech. J. Phys. 45 (1995)1125.
M. Mikula, M. Čeppan, J. Panak: Corrosion 51 (1995)206.
D. Wicaksana, A. Kobayashi, and A. Kinbara: J. Vac. Sci. Technol. A 10 (1992)1479.
M. R. Kozlowski, P. S. Tyler, and W. H. Smyrl: Surface Science 194 (1988)505.
H. Gerischer: Corros. Sci. 29 (1989)257.
A. Blažková, I. Csolleová, and V. Brezová: J. Photochem. Photobiol. A: Chem. 113 (1998)251.
M. Mikula, J. Blecha, and M. Čeppan: J. Electrochem. Soc. 139 (1992)3470.
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Mikula, M., Čeppan, M., Kindernay, J. et al. Photoelectrochemical properties of TiO x layers prepared by DC pulsed unbalanced reactive magnetron sputtering. Czechoslovak Journal of Physics 49, 393–403 (1999). https://doi.org/10.1023/A:1022809319510
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DOI: https://doi.org/10.1023/A:1022809319510