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Principle and applications of a floating energy analyser

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Czechoslovak Journal of Physics Aims and scope

Abstract

We describe a new type of energy analyser suitable for the use in plasmas having no external potential reference like ICPs and microwave discharges. It can be used to determine the ion distribution function (IDF) at a negatively biased surface and the high energy tail of the plasma electron distribution function (EDF). The EDF is measured without distortions by ion currents. This analyser was tested in a dc glow discharge and its results compared to measurements with Langmuir probes and a analyser with grounded reference. Some preliminary measurements were also performed in a rf parallel plate discharge.

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References

  1. U. Flender and K. Wiesemann: Plasma Chem. Plasma Proc.25 (1995) 123.

    Article  Google Scholar 

  2. K.U. Riemann, U. Ehlemann, and K. Wiesemann: J. Phys. D: Appl. Phys.25 (1992) 620.

    Article  ADS  Google Scholar 

  3. U. Flender and K. Wiesemann: J. Phys. D: Appl. Phys.27 (1994) 509.

    Article  ADS  Google Scholar 

  4. P.C. Johnson: inPlasma Physics: An Introductory Course (Editor Dendy R.O.), Cambridge University Press, 1993, p. 339.

  5. J. Robertson: Diamond Related Mater.2 (1993) 984.

    Article  Google Scholar 

  6. S. Reinke, M. Kuhr, W. Kulisch, and R. Kassing: Diamond Related Mater.4 (1995) 272.

    Article  Google Scholar 

  7. J.D. Swift and M.R.J. Schwar:Electrical Probes for Plasma Diagnostics, Iliffe Books, London, 1970.

    Google Scholar 

  8. S.G. Ingram and N.St.J. Braithwaite: J. Phys. D: Appl. Phys.21 (1988) 1496.

    Article  ADS  Google Scholar 

  9. S.G. Ingram, B.M. Annatarone, and M. Ohuchi: Rev. Sci. Instrum.61 (1990) 1883.

    Article  ADS  Google Scholar 

  10. K. Wiesemann: Z. Physik219 (1969) 462.

    Article  Google Scholar 

  11. S.L.M. Prokopenko, J.G. Laframboise, and J.M. Goodings: J. Phys. D: Appl. Phys.7 (1974) 355.

    Article  ADS  Google Scholar 

  12. S.L.M. Prokopenko, J.G. Laframboise, and J.M. Goodings: J. Phys. D: Appl. Phys.5 (1972) 2152.

    Article  ADS  Google Scholar 

  13. H.D. Hagstrum: Phys. Rev.104 (1956) 672.

    Article  ADS  Google Scholar 

  14. V.M. Alexandrov, U. Flender, N.B. Kolokolov, O.V. Rykova, and K. Wiesemann: Plasma Sources Sci. Technol.5 (1996) 523.

    Article  ADS  Google Scholar 

  15. U. Flender, B.H. Nguyen Thi, K. Wiesemann, N.A. Khromov, and N.B. Kolokolov: Plasma Sources Sci. Technol.5 (1996) 61.

    Article  ADS  Google Scholar 

  16. T. Okuda and K. Jamamoto: J. Appl. Phys.31 (1960) 158.

    Article  ADS  Google Scholar 

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Authors and Affiliations

  1. Laboratoire de Physique des Gaz et des Plasmas, Centre d’Orsay, Université Paris-Sud, Orsay, France

    Anne-Marie Pointu

  2. Faculty of Physics, “Al.I. Cuza” University, 6600, Iasi, Romania

    E. Stamate

  3. Experimentalphysik, insbes. Gaselektronik, Ruhr-Universität Bochum, D-44780, Bochum, Germany

    K. Wiesemann

Authors
  1. Anne-Marie Pointu
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  2. E. Stamate
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  3. K. Wiesemann
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Additional information

Dedicated to Prof. Jan Janča on the occasion of his 60th birthday, in remembrance of a fruitful and friendly European co-operation.

This work was supported by the Deutsche Forschungsgemeinschaft Bonn by Sonderforschungsbereich 191 and by the Directorate-General XII Science, Research and Development of European Commission, under Grant ERBCIPACT924034.

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Pointu, AM., Stamate, E. & Wiesemann, K. Principle and applications of a floating energy analyser. Czech J Phys 48, 1147–1159 (1998). https://doi.org/10.1023/A:1022801916514

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  • DOI: https://doi.org/10.1023/A:1022801916514

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