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Thickness measurement of nanometer films by XRD on nano-multilayers

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Journal of Materials Science Letters

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References

  1. S. Ozawa and S. Fujiwara, Thin Solid Films 37 (1976) 73.

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Authors and Affiliations

  1. State Key Lab of Metal Matrix Composites, Shanghai Jiao Tong University, 200030, People's Republic of China

    Qianxi Lai, Xiaojiang Yu, Geyang Li & Mingyuan Gu

Authors
  1. Qianxi Lai
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  2. Xiaojiang Yu
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  3. Geyang Li
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  4. Mingyuan Gu
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Corresponding author

Correspondence to Geyang Li.

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Lai, Q., Yu, X., Li, G. et al. Thickness measurement of nanometer films by XRD on nano-multilayers. Journal of Materials Science Letters 22, 261–263 (2003). https://doi.org/10.1023/A:1022396027869

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  • DOI: https://doi.org/10.1023/A:1022396027869

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