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Influence of the High‐Frequency Capacitive Discharge Regimes on the Parameters of the Plasma in N2/CO2/He Gas Mixtures

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Journal of Applied Spectroscopy Aims and scope

Abstract

The optical radiation spectra and the spatial structure of a planar high‐frequency capacitive discharge in N2/CO2/He gas mixtures have been investigated depending on the excitation frequency, discharge current, pressure, and chemical composition of the mixture.

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Authors and Affiliations

  1. Institute of Molecular and Atomic Physics, National Academy of Sciences of Belarus, 70 F. Skorina Ave., Minsk, 220072, Belarus

    V. V. Azharonok, I. I. Filatova & V. D. Shimanovich

  2. B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, Minsk

    L. N. Orlov

Authors
  1. V. V. Azharonok
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  2. I. I. Filatova
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  3. V. D. Shimanovich
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  4. L. N. Orlov
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Correspondence to V. V. Azharonok.

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Azharonok, V.V., Filatova, I.I., Shimanovich, V.D. et al. Influence of the High‐Frequency Capacitive Discharge Regimes on the Parameters of the Plasma in N2/CO2/He Gas Mixtures. Journal of Applied Spectroscopy 69, 761–768 (2002). https://doi.org/10.1023/A:1021569332028

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