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CVD diamond films for electronics

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Czechoslovak Journal of Physics Aims and scope

Abstract

Mechanical, optical, thermal and electronic properties of diamond films and chemical vapour deposition (CVD) techniques are briefly reviewed.

Some spectroscopical methods for the characterization of CVD diamond films are described (optical absorption, photothermal deflection spectroscopy, Raman spectroscopy and electron paramagnetic resonance), together with our recent results on investigation of electronic properties of the main defects in this material, relevant to the application of CVD diamond films for the future electronic devices.

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Authors and Affiliations

  1. Institute of Physics, Acad. Sci. CR, Cukrovarnická 10, CZ-16200, Praha, Czech Republic

    J. Rosa & M. Vaněček

  2. Materials Physics Division, Institute for Materials Research, Limburgs Universitair Centrum, Wetenschapspark, B-3590, Diepenbeek, Belgium

    M. Nesladek

Authors
  1. J. Rosa
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  2. M. Vaněček
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  3. M. Nesladek
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Additional information

This work was supported by Grant Agency of the Czech Republic, Grant No. 202/06/0446 and by the NATO Scientific Exchange Programme, HTECH.LG 940890 and NFWO (National Fonds voor Wetenschappelijk Orderzoek, Brussel) Project G.0014.96.

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Rosa, J., Vaněček, M. & Nesladek, M. CVD diamond films for electronics. Czech J Phys 47, 707–716 (1997). https://doi.org/10.1023/A:1021282601098

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  • DOI: https://doi.org/10.1023/A:1021282601098

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