Abstract
A calculation method for large neutral and/or charged cluster (with number of atoms N > 5) elastic sputtering of a metal during ion bombardment is proposed. The result is presented as a simple assymptotic formula for the probability of cluster ejection and cluster charge state. A conclusion is made on the exponential nature of the dependence of the total cluster yield on the number of atoms the cluster consists of.
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Matveev, V.I., Karpova, O.V. On the Theory of Neutral and Charged Cluster Ion Sputtering of Metal. Russian Physics Journal 45, 539–542 (2002). https://doi.org/10.1023/A:1021135015769
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DOI: https://doi.org/10.1023/A:1021135015769