Abstract
Data are given on recent advances in atomic force microscopy, which is used in precision measurements of various physical quantities and fields at solid surfaces. New designs are considered for micromechanical cantilevers, which are used as physical, chemical, and biological sensors.
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Arutyunov, P.A., Tolstikhina, A.L. Atomic Force Microscopy as a Universal Means of Measuring Physical Quantities in the Mesoscopic Length Range. Measurement Techniques 45, 714–721 (2002). https://doi.org/10.1023/A:1020903608209
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DOI: https://doi.org/10.1023/A:1020903608209