Skip to main content
Log in

Strain Relaxation in an Alloy Film with a Rough Free Surface

  • Published:
Journal of elasticity and the physical science of solids Aims and scope Submit manuscript

Abstract

We study strain relief by surface roughness and composition variation in a stressed alloy film. Instead of using common perturbation techniques, we derive a rigorous relaxation formula based on the energy approach in the case of slightly undulating surface and fluctuating composition. We do not require any a priori assumption of elastic isotropy or identical material properties between film and substrate in deriving our result. We show that the change of elastic energy is negative, giving rise to energy relief due to the presence of free surface. We apply our result to the study of compositional and morphological instabilities of a stressed thin layer with a free surface. The critical wave number of instability is determined by the competition between the destabilizing influence of elastic strain energy and the stabilizing influence of chemical and surface energies.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. R.J. Asaro and W.A. Tiller, Interface morphology development during stress corrosion cracking. Metall. Trans. 3 (1972) 1789–1796.

    Google Scholar 

  2. J.M. Ball and F. Murat, W 1,p-quasiconvexity and variational problems for multiple integrals. J. Funct. Anal. 58 (1984) 225–253.

    Google Scholar 

  3. U. Bangert, A.J. Harvey, V.A. Wilkinson, C. Dieker, J.M. Jowett, A.D. Smith, S.D. Perrin and C.J. Gibbins, Evidence for strain relaxation via composition fluctuations in strained quaternary/ quaternary and quaternary/ternary multiple quantum well structures. J. Cryst. Growth 132 (1993) 231–240.

    Google Scholar 

  4. D.M. Barnett and J. Lothe, Line force loadings on anisotropic half-spaces and wedges. Phys. Norv. 8 (1975) 13–22.

    Google Scholar 

  5. A. Braides, I. Fonseca and G. Francfort, 3D-2D asymptotical analysis for inhomogeneous thin films. Indiana Univ. Math. J. 49 (2000) 1367–1404.

    Google Scholar 

  6. J.W. Cahn, On spinodal decomposition. Acta Metall. 9 (1961) 795–801.

    Google Scholar 

  7. J.W. Cahn, On spinodal decomposition in cubic crystals. Acta Metall. 10 (1962) 179–183.

    Google Scholar 

  8. C.-H. Chiu and H. Gao, Stress singularities along a cycloid rough surface. Internat. J. Solids Structures 30 (1993) 2983–3012.

    Google Scholar 

  9. S. Christiansen, M. Albrecht, J. Michler and H.P. Strunk, Elastic and plastic relaxation in slightly undulated misfitting epitaxial layers - A quantitative approach by three-dimensional finite element calculations. Phys. Status Solidi 156 (1996) 129–150.

    Google Scholar 

  10. A.G. Cullis, D.J. Robbins, A.J. Pidduck and P.W. Smith, The characteristics of strain-modulated surface undulations formed upon epitaxial Si1-xGexalloy layers on Si.J. Cryst. Growth 123 (1992) 333–343.

    Google Scholar 

  11. W. Dorsch, B. Steiner, M. Albrecht, H.P. Strunk, H. Wawra and G. Wagner, The transition from ripples to islands in strained heteroepitaxial growth under low driving forces. J. Cryst. Growth 183 (1998) 305–310.

    Google Scholar 

  12. W. Dorsch, H.P. Strunk, H. Wawra, G. Wagner, J. Groenen and R. Carles, Strain-induced island scaling during Si1-xGex heteroepitaxy. Appl. Phys. Lett. 72 (1998) 179–181.

    Google Scholar 

  13. G. Duvaut and J.L. Lions, Inequalities in Mechanics and Physics. Springer, New York, 1976.

    Google Scholar 

  14. M. Dynna and G.R. Purdy, On the thermodynamic stability of a fully coherent two-component thin epitaxial film. Scripta Materialia 38 (1998) 349–355.

    Google Scholar 

  15. D.J. Eaglesham and M. Cerullo, Dislocation-free Stranski-Krastanow growth of Ge on Si(100). Phys. Rev. Lett. 64 (1990) 1943–1946.

    Google Scholar 

  16. J.A. Floro, E. Chason, R.D. Twesten, R.Q. Hwang and L.B. Freund, SiGe coherent islanding and stress relaxation in the high mobility regime. Phys. Rev. Lett. 79 (1997) 3946–3949.

    Google Scholar 

  17. L.B. Freund, On the stability of a biaxially stressed elastic material with a free surface under variations in surface shape. Z. angew Math. Phys. 16 (1995) S185–S200.

    Google Scholar 

  18. L.B. Freund and F. Jonsdottir, Instability of a biaxially stressed thin film on a substrate due to material diffusion over its free surface. J. Mech. Phys. Solids 41 (1993) 1245–1264.

    Google Scholar 

  19. H. Gao, Stress concentration at slightly undulating surfaces. J. Mech. Phys. Solids 39 (1991) 443–458.

    Google Scholar 

  20. H. Gao, Some general properties of stress-driven surface evolution in a heteroepitaxial thin film structure. J. Mech. Phys. Solids 42 (1994) 741–772.

    Google Scholar 

  21. J.W. Gibbs, Collected Works, Vol. 1. Yale University Press, New Heaven, CT, 1948.

    Google Scholar 

  22. F. Glas, Elastic state and thermodynamical properties of inhomogeneous epitaxial layers: Application to immiscible III-V alloys. J. Appl. Phys. 62 (1987) 3201–3208.

    Google Scholar 

  23. F. Glas, Thermodynamics of a stressed alloy with a free surface: Coupling between the morphological and compositional instabilities. Phys. Rev. B 55 (1997) 11277–11286.

    Google Scholar 

  24. F. Glas, Coupling of the morphological and compositional instabilities in a stressed alloy with a free surface. Applied Surface Science 123/124 (1998) 298–302.

    Google Scholar 

  25. F. Glas, Thermodynamic and kinetic instabilities of lattice-matched alloy layers: Compositional and morphological perturbations. Phys. Rev. B 62 (2000) 7393–7401.

    Google Scholar 

  26. F. Glas, M.M. Treacy, M. Quillec and H. Launois, Interface spinodal decomposition in LPE InxGa1-xAsyP1?y lattice matched to InP. J. Physique 43 (1982) 11–16.

    Google Scholar 

  27. M.Y. Grinfeld, Instability of the separation boundary between a nonhydrostatically stressed elastic body and a melt. Sov. Phys. Dokl. 31 (1986) 831–835.

    Google Scholar 

  28. J.E. Guyer and P.W. Voorhees, Morphological stability of alloy thin films. Phys. Rev. Lett. 74 (1995) 4031–4034.

    Google Scholar 

  29. J.E. Guyer and P.W. Voorhees, Morphological stability of alloy thin films. Phys. Rev. B 54 (1996) 11710–11724.

    Google Scholar 

  30. J.E. Guyer and P.W. Voorhees, Morphological stability and compositional uniformity of alloy thin films. J. Cryst. Growth 187 (1998) 150–165.

    Google Scholar 

  31. P. Henoc, A. Izrael, M. Quillec and H. Launois, Composition modulation in liquid-phase epitaxial InxGa1-xAsyP1?y layers lattice matched to InP substrates. Appl. Phys. Lett. 40 (1982) 963–965.

    Google Scholar 

  32. K.C. Hsieh, K.Y. Hsieh, Y.L. Hwang, T. Zhang and R.M. Kolbas, Strain-induced phase separation in annealed low-temperature grown Al0.3Ga0.7As. Appl. Phys. Lett. 68 (1996) 1790–1792.

    Google Scholar 

  33. I.P. Ipatova, V.G. Malyshkin and V.A. Shchukin, On spinodal decomposition in elastically anisotropic epitaxial films of III-V semiconductor alloys. J. Appl. Phys. 74 (1993) 7198–7210.

    Google Scholar 

  34. I.P. Ipatova, V.G. Malyshkin and V.A. Shchukin, Compositional elastic domains in epitaxial layers of phase-separating semiconductor alloys. Phil. Mag. B 70 (1994) 557–566.

    Google Scholar 

  35. D.E. Jesson, S.J. Pennycook, J.M. Baribeau and D.C. Houghton, Direct imaging of surface cusp evolution during strained-layer epitaxy and implications for strain relaxation. Phys. Rev. Lett. 71 (1993) 1744–1747.

    Google Scholar 

  36. H.T. Johnson and L.B. Freund, Mechanics of coherent and dislocated island morphologies in strained epitaxial material systems. J. Appl. Phys. 81 (1997) 6081–6090.

    Google Scholar 

  37. F. Jonsdottir and L.B. Freund, Equilibrium surface roughness of a strained epitaxial film due to surface diffusion induced by interface misfit dislocations. Mech. Mater. 20 (1995) 337–349.

    Google Scholar 

  38. R.V. Kukta and L.B. Freund, Minimum energy configuration of epitaxial material clusters on a lattice-mismatched substrate. J. Mech. Phys. Solids 45 (1997) 1835–1860.

    Google Scholar 

  39. T. Okada, G.C. Weatherly and D.W. McComb, Growth of strained InGaAs layers on InP substrates. J. Appl. Phys. 81 (1996) 2185–2196.

    Google Scholar 

  40. C.S. Ozkan, W.D. Nix and H. Gao, Strain relaxation and defect formation in heteroepitaxial Si1-xGex films via surface roughening induced by controlled annealing experiments. Appl. Phys. Lett. 70 (1997) 2247–2249.

    Google Scholar 

  41. F. Peiro, A. Cornet, J.R. Morante, S. Clark and R.H. Williams, Influence of the composition modulation on the relaxation of In0.54Ga0.46As strained layers. Appl. Phys. Lett. 59 (1991) 1957–1959.

    Google Scholar 

  42. Y.C. Shu, Heterogeneous thin films of martensitic materials. Arch. Rational Mech. Anal. 153 (2000) 39–90.

    Google Scholar 

  43. Y.C. Shu, In preparation, 2002.

  44. C.W. Snyder, B.G. Orr, D. Kessler and L.M. Sander, Effect of strain on surface-morphology in highly strained InGaAs films. Phys. Rev. Lett. 66 (1991) 3032–3035.

    Google Scholar 

  45. B.J. Spencer and D.I. Meiron, Nonlinear evolution of the stress-driven morphological instability in a 2-dimensional semiinfinite solid. Acta Metall. 42 (1994) 3629–3641.

    Google Scholar 

  46. B.J. Spencer, P.W. Voorhees and S.H. Davis, Morphological instability in epitaxial strained dislocation-free solid films. Phys. Rev. Lett. 67 (1991) 3696–3699.

    Google Scholar 

  47. B.J. Spencer, P.W. Voorhees and J. Tersoff, Enhanced instability of strained alloy films due to compositional stresses. Phys. Rev. Lett. 84 (2000) 2449–2452.

    Google Scholar 

  48. B.J. Spencer, P.W. Voorhees and J. Tersoff, Stabilization of strained alloy film growth by a difference in atomic mobilities. Appl. Phys. Lett. 76 (2000) 3022–3024.

    Google Scholar 

  49. D.J. Srolovitz, On the stability of surfaces of stressed solids. Acta. Metall. 37 (1989) 621–625.

    Google Scholar 

  50. G.B. Stringfellow, Spinodal decomposition and clustering in III/V alloys. J. Electron. Mater. 11 (1982) 903–918.

    Google Scholar 

  51. J. Tersoff and R.M. Tromp, Shape transition in growth of strained islands: spontaneous formation of quantum wires. Phys. Rev. Lett. 70 (1993) 2782–2785.

    Google Scholar 

  52. T.C.T. Ting, Anisotropic Elasticity. Oxford University Press, Oxford, 1996.

    Google Scholar 

  53. M.M.J. Treacy, J.M. Gibson and A. Howie, On elastic relaxation and long wavelength microstructures in spinodally decomposed InxGa1-xAsyP1?y epitaxial layers. Philos. Mag. A 51 (1985) 389–417.

    Google Scholar 

  54. C.H. Wu, Stress and notch-stress concentration induced by slight depressions and protrusions. J. Appl. Mech. 60 (1993) 992–997.

    Google Scholar 

  55. C.H. Wu, Regularly and singularly perturbed cracks. Quart. Appl. Math. 52 (1994) 529–543.

    Google Scholar 

  56. C.H. Wu, The role of Eshelby stress in composition-generated and stress-assisted diffusion. J. Mech. Phys. Solids 49 (2001) 1771–1794.

    Google Scholar 

  57. C.H. Wu, The nonlinear effect of lattice mismatch parameter on morphological compositional instabilities of epitaxial layers. In preparation, 2000.

  58. K.-C. Wu, Generalization of the stroth formalism to 3-dimensional anisotropic elasticity. J. Elasticity 51 (1998) 213–225.

    Google Scholar 

  59. W.H. Yang and D.J. Srolovitz, Crack-like surface instability in stressed solids. Phys. Rev. Lett. 71 (1993) 1593–1596.

    Google Scholar 

  60. J.Y. Yao, T.G. Andersson and G.L. Dunlop, The interfacial morphology of strained epitaxial InxAl1-xAs/GaAs. J. Appl. Phys. 69 (1991) 2224–2230.

    Google Scholar 

  61. Y.W. Zhang and A.F. Bower, Numerical simulations of island formation in a coherent strained epitaxial thin film system. J. Mech. Phys. Solids 47 (1999) 2273–2297.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Shu, Y. Strain Relaxation in an Alloy Film with a Rough Free Surface. Journal of Elasticity 66, 63–92 (2002). https://doi.org/10.1023/A:1020562916520

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1020562916520

Navigation