Abstract
The results of investigation of the electrical characteristics and the radiation of the plasma of a transverse volume discharge in chlorine at a pressure of 0.1–1.5 kPa are presented. The discharge is ignited in a volume of 18 × 2.2 × (0.5–1.0) cm3 (the interelectrode gap is 2.2 cm) at a charging voltage of 5–10 kV. The plasma radiation is investigated in the range of 190–900 nm. A stable volume discharge is obtained with the current pulse duration of up to 100 ns, which may be used in an ultraviolet bactericidal lamp (200–257 nm), and in a pulsed plasmachemical reactor for dry etching. The diagnostic bands of a Cl2 molecule and the spectral lines of a Cl atom are determined. Their radiation intensity is optimized as a function of the pressure in the discharge chamber.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
REFERENCES
Shuaibov, A.K., Shimon, L.L., Shevera, I.V., and Dashchenko, A.I., Fiz. Plazmy, 1999, vol. 25, no. 7, p. 640.
Shuaibov, A.K., Zh. Prikl. Spektrosk., 1999, vol. 66, no. 2, p. 241.
Shuaibov, A.K., Shimon, L.L., Dashchenko, A.I., and Shevera, I.V., Teplofiz. Vys. Temp., 2000, vol. 38, no. 3, p. 386 (High Temp. (Engl. transl.), vol. 38, no. 3, p. 363).
Shuaibov, A.K., Zh. Tekh. Fiz., 2000, vol. 70, issue 10, p. 117.
Vasilyak, L.M., Kostyuchenko, S.V., Krasnochub, A.V., and Kuz'menko, M.E., Zh. Prikl. Spektrosk., 1998, vol. 65, no. 2, p. 302.
Vasilyak, L.M., Kostyuchenko, S.V., Krasnochub, A.V., et al., Teplofiz. Vys. Temp., 1995, vol. 33, no. 6, p. 826 (High Temp. (Engl. transl.), vol. 33, no. 6, p. 822).
Shuaibov, A.K., Dashchenko, A.I., and Shevera, I.V., Teplofiz. Vys. Temp., 2001, vol. 39, no. 5, p. 833 (High Temp. (Engl. transl.), vol. 39, no. 5, p. 775).
Korolev, Yu.D., Mesyats, G.A., and Yarosh, A.M., Khim. Vys. Energ., 1987, vol. 21, no. 5, p. 464.
Orlikovskii, A.A., Mikroelektronika, 1999, vol. 28, no. 5, p. 344.
Orlikovskii, A.A. and Rudenko, K.V., Mikroelektronika, 2001, vol. 30, no. 2, p. 85.
Shuaibov, A.K., Kvantovaya Elektron., 1999, vol. 26, no. 2, p. 127.
Pears, R.W.B. and Gaydon, A.G., The Identification of Molecular Spectra, London: Chapman Hall, 1963.
Spectroscopic Data, vol. 2: Homonuclear Diatomic Molecules, Suchard, S.N. and Melzer, J.E., Eds., New York: IFI/Plenum, 1976.
Striganov, A.P. and Odintsova, G.A., Tablitsy spektral'nykh linii atomov i ionov (Tables of Spectral Lines of Atoms and Ions), Moscow: Energoizdat, 1982.
Smirnov, B.M. and Yatsenko, A.S., Parameters of Gas Dimers, Khimiya plazmy (Chemistry of Plasma), Smirnov, B.M., Ed., Moscow: Energoatomizdat, 1989, issue 15, p. 93.
Spichkin, G.L., Zh. Tekh. Fiz., 1986, vol. 56, issue 10, p. 1923.
Apollonov, V.V., Belevtsev, A.A., Kazantsev, S.Yu., et al., Kvantovaya Elektron., 2000, vol. 30, no. 3, p. 207.
Efremov, A.M., Kupriyanovskaya, A.P., and Svettsov, V.I., Zh. Prikl. Spektrosk., 1993, vol. 59, nos. 3–4, p. 221.
Sushanin, I.V. and Fel'tsan, P.V., Ukr. Fiz. Zh., 1997, vol. 42, no. 9, p. 1046.
Gorokhov, A.V., Maksimov, A.I., Sizov, V.D., and Stepanova, L.S., Zh. Tekh. Fiz., 1972, vol. 42, issue 10, p. 2176.
Kupriyanovskaya, A.P., Rybkin, V.V., and Svettsov, V.I., Izv. Vyssh. Uchebn. Zaved. Khim. Khim. Tekhnol., 1990, vol. 33, issue 9, p. 31.
Yastremskii, A.G. and Yampol'skii, S.A., Izv. Vyssh. Uchebn. Zaved. Fiz., 1999, no. 8, p. 63.
Kudryavtsev, A.A., Kuranov, A.L., Mishakov, V.G., et al., Zh. Tekh. Fiz., 2001, vol. 71, issue 3, p. 29.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Shuaibov, A.K., Shimon, L.L., Shevera, I.V. et al. Electrical and Optical Characteristics of a Transverse Volume Discharge in Chlorine. High Temperature 40, 639–643 (2002). https://doi.org/10.1023/A:1020459631600
Issue Date:
DOI: https://doi.org/10.1023/A:1020459631600