Abstract
The results of a theoretical and experimental investigation of thin-film piezoelectric pressure sensors are presented.
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REFERENCES
A. A. Kazaryan, Izmer. Tekh., No. 6, 36 (2000).
A. A. Kazaryan, Izmer. Tekh., No. 1, 27 (2000).
G. A. Lushcheikin, Polymer Piezoelectric Materials [in Russian], Khimiya, Moscow (1990).
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Kazaryan, A.A. A Thin-Film Piezoelectric Pressure Sensor. Measurement Techniques 45, 515–518 (2002). https://doi.org/10.1023/A:1020068006447
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DOI: https://doi.org/10.1023/A:1020068006447