REFERENCES
Voronkov, M.G., Sulimin, A.D., Yachmenev, V.V., et al., Dokl. Akad. Nauk SSSR, 1978, vol. 241, no.6, pp. 1363–1366.
Voronkov, M.G., Sulimin, A.D., Yachmenev, V.V., et al., Dokl. Akad. Nauk SSSR, 1979, vol. 244, no.1, pp. 127–130.
Sugano, T., Hoh, K., Kudo, K., et al., J. Appl. Phys., 1968, vol. 7, no.7, pp. 715–730.
Voronkov, M.G., Basenko, S.V., Vitkovskii, V.Yu., et al., Metalloorg. Khim., 1989, vol. 2, no.2, pp. 310–313.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Voronkov, M.G., Basenko, S.V. & Mirskov, R.G. Plasmochemical Preparation of Antimony Silicate Coatings Based on Tris(trimethylsilyl) Antimonite. Doklady Physical Chemistry 385, 195–196 (2002). https://doi.org/10.1023/A:1019967207626
Issue Date:
DOI: https://doi.org/10.1023/A:1019967207626