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Positive-type patterned ZnO films prepared by a chemically modified sol-gel method

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Nippon Sheet Glass Co. Ltd., 1-7, 2-Chome, Kaigan, Minato-Ku, Tokyo, 105-8552, Japan

    T. Kawahara

  2. Department of Applied Chemistry, Faculty of Science and Engineering, Kinki University, 3-4-1, Kowakae, Higashi-Osaka, Osaka, 577-8502, Japan

    T. Ishida & S. Ito

  3. Molecular Engineering Institute, Kinki University, 3-4-1, Kowakae, Higashi-Osaka, Osaka, 577-8502, Japan

    H. Tada & S. Ito

  4. Department of Metallurgical Engineering, Faculty of Science and Engineering, Kinki University, 3-4-1, Kowakae, Higashi-Osaka, Osaka, 577-8502, Japan

    N. Tohge

Authors
  1. T. Kawahara
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  2. T. Ishida
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  3. H. Tada
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  4. N. Tohge
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  5. S. Ito
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Corresponding author

Correspondence to H. Tada.

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Kawahara, T., Ishida, T., Tada, H. et al. Positive-type patterned ZnO films prepared by a chemically modified sol-gel method. Journal of Materials Science Letters 21, 1423–1425 (2002). https://doi.org/10.1023/A:1019966700345

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  • DOI: https://doi.org/10.1023/A:1019966700345

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