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Scandium dipivaloyl methanate as a volatile precursor for thin film deposition

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Abstract

The coupling of a quadrupole mass spectrometer (QMS) via a heated capillary to a commercial thermogravimetric analyser is described. The amu and temperature ranges available were up to 1000 amu and 1500°C, respectively. The system was evaluated with test compounds, yielding gaseous species in the m/z range of 17-80, and then used for the study of thermal behaviour of scandium dipivaloyl methanate or Sc(thd)3 which is discussed in detail. Sc(thd)2 appears as the major Sc-containing species with m/z=411 in the gas phase at 200-300°C.

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Author notes

  1. K. Mészáros-Szécsényi

    Present address: Faculty of Sciences, Institute of Chemistry, University of Novi Sad, YU-21000, Novi Sad, Trg. Dositeja Obradovica 3, Yugoslavia

Authors and Affiliations

  1. Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, FIN-02015, Espoo, Finland

    K. Mészáros-Szécsényi, J. Päiväsaari, M. Putkonen & L. Niinistö

  2. Institute of General and Analytical Chemistry, Budapest University of Technology and Economics, H-1521, Budapest, Hungary

    G. Pokol

Authors
  1. K. Mészáros-Szécsényi
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  2. J. Päiväsaari
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  3. M. Putkonen
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  4. L. Niinistö
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  5. G. Pokol
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Mészáros-Szécsényi, K., Päiväsaari, J., Putkonen, M. et al. Scandium dipivaloyl methanate as a volatile precursor for thin film deposition. Journal of Thermal Analysis and Calorimetry 69, 65–75 (2002). https://doi.org/10.1023/A:1019929521641

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  • DOI: https://doi.org/10.1023/A:1019929521641

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