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Multiwave Low‐Pressure Excimer Radiator

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Journal of Applied Spectroscopy Aims and scope

Abstract

The excitation conditions and characteristics of a longitudinal glow discharge in a short tube of small diameter in Kr/Cl2 and Ar/Kr/Cl2 mixtures are investigated. It is shown that this discharge is a multiwave radiation source on systems of the 199/222/258 and 175/199/222/258 nm bands. Optimization of the pressure and composition of working mixtures most applicable for obtaining the approximately equal intensity of the ArCl(B X), KrCl(D, B X), and Cl2(DA′) radiation bands is carried out in the discharge investigated. A multiwave UV‐VUV radiation source is of interest for use in photometry, microelectronics, photochemistry, and medicine.

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Shuaibov, A.K., Dashchenko, A.I. & Shevera, I.V. Multiwave Low‐Pressure Excimer Radiator. Journal of Applied Spectroscopy 68, 366–370 (2001). https://doi.org/10.1023/A:1019249110271

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  • DOI: https://doi.org/10.1023/A:1019249110271

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