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Chemical vapour deposition of silicon carbide by pyrolysis of methylchlorosilanes

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Welding Engineering, Taegu Junior Health College, Taejeundong san 7, Pookgu, Taegu, 702-260, Korea

    Byung Jin Choi

  2. Department of Metallurgical Engineering, Kyungpook National University, Sankyukdong 1370, Pookgu, Taegu, 702-701, Korea

    Dong Won Park & Dai Ryong Kim

Authors
  1. Byung Jin Choi
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  2. Dong Won Park
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  3. Dai Ryong Kim
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Choi, B.J., Park, D.W. & Kim, D.R. Chemical vapour deposition of silicon carbide by pyrolysis of methylchlorosilanes. Journal of Materials Science Letters 16, 33–36 (1997). https://doi.org/10.1023/A:1018584330520

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  • DOI: https://doi.org/10.1023/A:1018584330520

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