Skip to main content
Log in

Effect of deposition temperature on phase formation in Nb/Si multilayers

  • Published:
Journal of Materials Science Letters

Abstract

Abstracts are not published in this journal

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. K. N. TU and J. W. MAYER, in “Thin films, interdiffusion and reactions”, edited by J. M. Poate, K. N. Tu and J. W. Mayer (Wiley, New York, 1978).

    Google Scholar 

  2. M. A. NICOLET and S. S. LAU, in “VLSI electronic, microstructure science”, edited by N. G. Einapruch and G. B. Larrabee (Academic Press, New York, 1983).

    Google Scholar 

  3. R. BENE, J. Appl. Phys. 61(1987) 1826.

    Article  CAS  Google Scholar 

  4. F. M. D’HEURLE and P. GAS, J. Mater. Res. 1(1986) 205.

    CAS  Google Scholar 

  5. U. GOSELE and K. N. TU, J. Appl. Phys. 66(1989) 2612.

    Article  Google Scholar 

  6. S. F. GONG and H. T. HENTZELL, ibid. 68(1990) 4542.

    Article  CAS  Google Scholar 

  7. P. A. PSARAS, M. EIZENBERG and K. N. TU,ibid. 56 (1984) 3439.

    Article  CAS  Google Scholar 

  8. F. D’HEURLE, C. S. PETERSSON, J. E. E. BAGLIN, S. J. LAPLACA and C. Y. WONG, ibid. 55(1984) 4208.

    Article  CAS  Google Scholar 

  9. HWA-YUEH YANG and R. W. BENE, ibid. 59(1986) 1525.

    Article  CAS  Google Scholar 

  10. M. H. WANG and L. J. CHEN, Appl. Phys. Lett. 58(1991) 463.

    Article  CAS  Google Scholar 

  11. W. Y. HSIEH, J. H. LIN and L. H. CHEN, ibid. 62(1993) 1088.

    Article  CAS  Google Scholar 

  12. J. M. LIANG and L. J. CHEN, J. Appl. Phys. 64(1994) 1224.

    CAS  Google Scholar 

  13. J. Y. CHENG and L. J. CHEN, ibid. 69(1991) 2161.

    CAS  Google Scholar 

  14. M. RONAY, Appl. Phys. Lett. 42(1983) 577.

    Article  CAS  Google Scholar 

  15. R. PRETORIUS, Vacuum 41(1990) 1038.

    Article  CAS  Google Scholar 

  16. TAICHI NAKANISHI, MAYUMI TAKEYAMA and ATSUSHI NOYA, J. Appl. Phys. 77(1995) 948.

    Article  CAS  Google Scholar 

  17. W. H. WANG and W. K. WANG, J. Mater. Res. 9(1994) 401.

    CAS  Google Scholar 

  18. Y. MISHIMA, M. TAKEI, T. UEMASTSU, N. MATSUMOTO, T. KAKEHI, U. WAKINO and M. OKABE, J. Appl. Phys. 78(1995) 217.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

ZHANG, M., YU, W. & WANG, W.K. Effect of deposition temperature on phase formation in Nb/Si multilayers. Journal of Materials Science Letters 16, 241–243 (1997). https://doi.org/10.1023/A:1018568110898

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1018568110898

Keywords

Navigation