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Bulk lifetime determination in high purity silicon by contactless laser technique

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Abstract

The result of bulk lifetime measurements in high purity silicon are presented. For this investigation we offer a new method and technique for determination of the bulk value of the excess carrier lifetime in high purity silicon. The effective value of the lifetime being measured in such a material depends on the dimensions of the ingot. In our method the sample to be investigated is illuminated by the modulated radiation of the AlGaAs light-emitting diode (LED), which generates the excess carriers, and by the probe beam of the He-Ne laser (λp = 3.39 μm), which becomes modulated when passing through the sample. The bulk lifetime is determined by the analysis of the dependence of the phase shift between these two modulations versus the distance r between the points on the sample surface illuminated by the sources.

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FEDORTSOV, A.B., LETENKO, D.G., CHURKIN, Y.V. et al. Bulk lifetime determination in high purity silicon by contactless laser technique. Journal of Materials Science: Materials in Electronics 8, 213–216 (1997). https://doi.org/10.1023/A:1018558500090

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  • DOI: https://doi.org/10.1023/A:1018558500090

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