Skip to main content
SpringerLink
Log in

Microhardness and surface roughness of silicon carbide by chemical vapour deposition

  • Published:
Journal of Materials Science Letters

Abstract

Abstracts are not published in this journal

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. I. N. FRANTSEVICH, in “Silicon carbide”, edited by I. N. Frantsevich (Consultants Bureau, New York, 1970) p. 1.

    Google Scholar 

  2. T. NARUSHIMA, T. GOTO, Y. IGUCHI and T. HIRAI, J. Amer. Ceram. Soc. 73 (1990) 3580.

    Article  CAS  Google Scholar 

  3. D. P. STINTON, T. M. BESMANN and R. A. LOWDEN, Amer. Ceram. Soc. Bull. 67 (1988) 350.

    CAS  Google Scholar 

  4. M. L. HAMMOND, Solid St. Technol. May (1988) 159.

  5. T. M. BESMANN, B. W. SHELDON, R. A. LOWDEN and D. P. STINTON, Science253 (1991) 1104.

  6. Y. W. KIM, J. S. SONG, S. W. PARK and J. G. LEE, 28 (1993) 3866.

  7. D. J. KIM, D. J. CHOI and Y. W. KIM, Thin Solid Films 266 (1995) 192.

    Article  CAS  Google Scholar 

  8. R. F. BUNSHAH, “Deposition technologies for films and coatings” (Noyes, New Jersey, 1982) p. 68.

    Google Scholar 

  9. H. M. GABRIEL and K. H. KLOOS, Thin Solid Films118 (1984) 243.

  10. D. N. LEE, J. Mater. Sci.24 (1989) 4375.

    Google Scholar 

  11. K. NIIHARA and T. HIRAI, ibid.11 (1976) 593.

  12. C. H. CHU, Y. M. LU and M. H. HON, ibid.27 (1992) 3883.

  13. J. SCHLICHTING, Powder Metall. Int.12 (1980) 141.

  14. Idem, ibid. 22 (1990) 196.

  15. T. D. GULDEN, J. Amer. Ceram. Soc.51 (1968) 424.

    Google Scholar 

  16. D. J. CHENG, W. J. SHYY, D. H. KUO and M. H. HON, J. Electrochem. Soc. 134 (1987) 3145.

    Article  CAS  Google Scholar 

  17. K. NIIHARA, Amer. Ceram. Soc. Bull.63 (1984) 1160.

  18. I. J. McCOLM, “Ceramic hardness” (Plenum Press, New York, 1990).

    Google Scholar 

  19. R. W. RICE, C. C. WU and F. BORCHELT, J. Amer. Ceram. Soc.77 (1994) 2539.

Download references

Author information

Authors and Affiliations

  1. Department of Ceramic Engineering, Yonsei University, 134 Shinchon, Sudaemun-Ku, Seoul, South Korea

    Dong-Joo Kim & Doo-Jin Choi

Authors
  1. Dong-Joo Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Doo-Jin Choi
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kim, DJ., Choi, DJ. Microhardness and surface roughness of silicon carbide by chemical vapour deposition. Journal of Materials Science Letters 16, 286–289 (1997). https://doi.org/10.1023/A:1018549001328

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1018549001328

Keywords

Search

Navigation