Skip to main content
SpringerLink
Log in

A structural characterization of AlN thin film deposited on a single crystal Al2O3(0 0 0 1) substrate

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. R. F. DAVID, Proc. IEEE(1991) 702.

  2. W. H. SCHLOSBERG and J. B. COHEN, J. Appl. Crystallogr. 16(1983) 304.

    Article  Google Scholar 

  3. R. L. ROTHMAN and J. B. COHEN, J. Appl. Phys. 42 (1971) 971.

    Article  Google Scholar 

  4. R. W. VOOK, in ‘‘Epitaxial Growth’’ (Academic Press, New York, 1975) p. 339.

    Google Scholar 

  5. A. SEGMULLER, I. C. NOYAN and V. S. SPERIOUS, Prog. Cryst. Growth Charact. 18(1989) 21.

    Google Scholar 

  6. C. J. SUN, P. KUNG, A. SAXLER, H. OHSATO, K. HARITOS and M. RAZEGHI, J. Appl. Phys. 75 (1994) 3964.

    Article  Google Scholar 

  7. W. M. YIM and R. J. PAFF, ibid. 45(1974) 1456.

    Article  Google Scholar 

  8. H. WINDISCHMANN, J. Vac. Sci. Technol. A 9(1991) 2431.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Materials Science and Engineering, Pohang University of Science and Technology, Pohang, Kyoung-Buk, South Korea

    K. H. KIM , C. H. CHANG  & Y. M. KOO

Authors
  1. K. H. KIM
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. C. H. CHANG
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Y. M. KOO
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

KIM , K.H., CHANG , C.H. & KOO , Y.M. A structural characterization of AlN thin film deposited on a single crystal Al2O3(0 0 0 1) substrate. Journal of Materials Science Letters 16, 1457–1459 (1997). https://doi.org/10.1023/A:1018542217877

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1018542217877

Keywords

Search

Navigation