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Electropolishing of silicon using hydrazine

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Abstract

A new electropolishing technique has been investigated for polishing silicon using aqueous hydrazine. p-Type silicon samples are electropolished using this technique and the optimum experimental condition required to achieve this is suggested.

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Authors and Affiliations

  1. Departments of Electrical and Computer Engineering, Orlando, FL, 32816–2450, USA

    K. B SUNDARAM

  2. Mechanical and Aerospace Engineering, University of Central Florida, Orlando, FL 32816–2450, USA

    V. H DESAI

Authors
  1. K. B SUNDARAM
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  2. V. H DESAI
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SUNDARAM, K.B., DESAI, V.H. Electropolishing of silicon using hydrazine. Journal of Materials Science: Materials in Electronics 8, 99–101 (1997). https://doi.org/10.1023/A:1018521524681

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  • DOI: https://doi.org/10.1023/A:1018521524681

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