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Characterization of an argon magnetron plasma by a cylindrical Langmuir probe

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Production Technology Development Center, Kaitech, Siheung, 429-450, South Korea

    Seong-Young Kim

  2. Department of Metallurgy and Materials Science, Hanyang University, Ansan, 425-791, South Korea

    Jai-Sung Lee

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  1. Seong-Young Kim
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  2. Jai-Sung Lee
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Kim, SY., Lee, JS. Characterization of an argon magnetron plasma by a cylindrical Langmuir probe. Journal of Materials Science Letters 16, 547–549 (1997). https://doi.org/10.1023/A:1018509603996

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  • DOI: https://doi.org/10.1023/A:1018509603996

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