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Improvement of interface morphology between titanium-silicide and poly-Si thin film using Ar plasma treatment

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Advanced Materials Science and Engineerings, Kang Won National University, 192-1 Hyojadong, Chuncheon, Kangwondo, 200-701, Republic of Korea

    Jae-Moon Choi, Dae-Jung Kim, Hyoung-In Kim & Myoung-Gi So

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  1. Jae-Moon Choi
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  2. Dae-Jung Kim
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  3. Hyoung-In Kim
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  4. Myoung-Gi So
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Choi, JM., Kim, DJ., Kim, HI. et al. Improvement of interface morphology between titanium-silicide and poly-Si thin film using Ar plasma treatment. Journal of Materials Science Letters 21, 325–328 (2002). https://doi.org/10.1023/A:1017952627051

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