Abstract
The photolysis of Ni(CO)2(PPh3)2 as surface films on silicon surfaces has been investigated. The photolysis of the title complex leads to the loss of ligand from the coordination sphere and the formation of nickel. The ligands are largely lost to the gas phase although impurity originating from the triphenylphosphine ligand remains within the film. The controlled construction of films formed from a mixture of Ni(CO)2(PPh3)2 and Cr(CO)5PPh3 could be accomplished by spin coating from a solution containing both precursors. Photolysis of films composed of a mixture of Ni(CO)2(PPh3)2 and Cr(CO)5PPh3 resulted in the formation of a nickel-chromium film. In a similar fashion films constructed from of Ni(CO)2(PPh3)2 and Fe(CO)4PPh3 could be photolysed to generate films of nickel-iron and films composed of Cr(CO)5PPh3 and Fe(CO)4PPh3 could be photolysed to generate films of chromium-iron. Both of these films contained impurities associated with remnant triphenylphosphine and oxidation of the surface. This process was shown to be compatible with standard lithography techniques by the lithography of 2 μm lines of triphenylphosphine contaminated nickel on a silicon surface.
Similar content being viewed by others
References
M. J. ALMOND, D. A. RICE and C. A. YATES, Chem. in Br. 24(1988) 1130.
O. ABE and A. TSUGE, J. Mater. Res. 6(1991) 928.
M. J. RAND, J. Electrochem. Soc. 120(1973) 686.
A. M. DHOTE, S. C. PATIL, S. M. KANETKAR, S. A. GANGAL and S. B. OGALE, J. Mater. Res 7(1992) 1685.
R. KUMAR, M. RASHIDI and R. J. PUDDEPHATT, Polyhedron 8(1989) 551.
P. SOULETIE and B. W. WESSELS, J. Mater. Res. 3(1988) 740.
N. H. DRYDEN, R. KUMAR, E. OU, M. RASHIDI, S. ROY, P. R. NORTON and R. J. PUDDEPHATT, Chem. Mater. 3(1991) 677.
H. H. GILGEN, T. CACOURIS, P. S. SHAW, R. R. KRCHNAVEK and R. M. OSGOOD, Appl. Phys.B 42(1987) 55.
R. ALEXANDRESCU, E. BORSELLA, S. BOTTI, M. P. CESILE, R. GIORGI, S. MARTELLI, S. TURTU and G. ZAPPA, J. Mater. Res. 12(1997) 774.
L. M. FALICOV, D. T. PIERCE, S. D. BADER, R. GRONSKY, K. B. HATHAWAY, H. J. HOPSTER, D. N. LAMBETH, S. S. P. PARKIN, G. PRINZ, M. SALAMON, I. K. SCHULLER and R. H. VICTORA, ibid. 5(1990) 1299.
V. P. DRAVID, B. R. ELLIOTT, J. J. HOST, J. -H. HWANG, D. L. JOHNSON, T. O. MASON and M. H. TENG, ibid. 12(1997) 1076.
S. VENZKE, R. B. VAN DOVER, J. M. PHILLIPS, E. M. GYORGY, T. SIEGRIST, C. -H. CHEN, D. WERDER, R. M. FLEMING, R. J. FELDER, E. COLEMAN and R. OPILA, ibid. 11(1996) 1187.
D. K. LIU, R. J. CHIN and A. L. LAI, Chem. Mater. 3(1991) 13.
M. GAO and R. H. HILL, Journal of Materials Research 13 (1998) 1397.
S. L. BLAIR and R. H. HILL, J. Organomet. Chem. 554(1998) 63.
A. BECALSKA, R. J. BATCHELOR, F. W. B. EINSTEIN, R. H. HILL and B. J. PALMER, Inorg. Chem. 31(1992) 3118.
C. W. CHU and R. H. HILL Mater. Chem. and Physics 43 (1996) 135.
D. G. BICKLEY, R. H. HILL and C. I. HORVATH, J. Photochem. Photobiol. A: Chem. 67(1992) 181.
C. L. W. CHING and R. H. HILL, J. Vac. Sci. & Tech.A. 16 (1998) 897.
J. P. BRAVO-VASQUEZ, L. W. C. CHING, W. L. LAW and R. H. HILL, Journal of Photopolymer Science and Technology 11(1998) 589.
W. L. LAW and R. H. HILL, Mater. Res. Bull. 33(1998) 69.
S. L. BLAIR, J. HUTCHINS, R. H. HILL and D. G. BICKLEY, J. Mater. Sci. 28(1994) 2143.
S. L. BLAIR, C. W. CHU, R. DAMMEL and R. H. HILL, in SPIE Proceedings Vol. 3049, Advances in Resist Technology and Processing XIV, edited by G. Regine (1997) p. 829.
R. H. HILL and S. L. BLAIR, in Micro and Nano Patterning Polymers, edited by Hiroshi Ito, Elsa Reichmanis, Omkaram Nalamasu, and Takumi Ueno, ACS Symposium Series 706; (1998) ch. 5, p. 53.
H. I. CONDER and M. Y. DARENSBURG, J. Oranomet. Chem. 67(1974) 93.
F. A. COTTON and R. V. PARISH, J. Chem. Soc.(1960) 1440.
T. A. MAGEE, C. N. MATTHEWS, T. S. WANG and J. H. WOTIZ, J. Am. Chem. Soc. 83(1961) 3200.
L. S. MERIWETHER and M. L. FIENE, ibid. 81(1959) 4200.
R. H. HILL and J. D. DEBAD, Polyhedron 10(1991) 1705.
D. MEYERHOFER, J. Appl. Phys. 49(1978) 3993.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Chu, W.C.H., Blair, S.L. & Hill, R.H. Photochemistry of bistriphenyl phosphine nickel dicarbonyl on silicon surfaces: the lithographic deposition of nickel and nickel-iron, nickel-chromium and iron-chromium containing films. Journal of Materials Science 37, 3685–3691 (2002). https://doi.org/10.1023/A:1016513309351
Issue Date:
DOI: https://doi.org/10.1023/A:1016513309351