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Effect of the species of sputtering gas on the composition of multi-component glass film: A new approach to control the composition of multi-component glass film

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Journal of Materials Science Letters

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Authors and Affiliations

  1. National Institute of Advanced Industrial Science and Technology, 1-8-31 Midorigaoka Ikeda, Osaka, Japan

    T. Akai & H. Yamanaka

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  1. T. Akai
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  2. H. Yamanaka
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Correspondence to T. Akai.

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Akai, T., Yamanaka, H. Effect of the species of sputtering gas on the composition of multi-component glass film: A new approach to control the composition of multi-component glass film. Journal of Materials Science Letters 21, 765–766 (2002). https://doi.org/10.1023/A:1015793507762

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