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Microstructural and analytical investigation of low temperature crystallized amorphous silicon/crystallized silicon interface using SEM and EDS

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Electron Microscope Section, National Physical Laboratory, Dr. K. S. Krishnan Road, New Delhi, 110012, India

    R. Kishore & K. N. Sood

  2. Electrical Engineering Department, University of Arkansas, 3217-Bill Engineering Center, Fayetteville, AR, 72701, USA

    H. A. Naseem

Authors
  1. R. Kishore
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  2. K. N. Sood
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  3. H. A. Naseem
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Kishore, R., Sood, K.N. & Naseem, H.A. Microstructural and analytical investigation of low temperature crystallized amorphous silicon/crystallized silicon interface using SEM and EDS. Journal of Materials Science Letters 21, 647–648 (2002). https://doi.org/10.1023/A:1015600423981

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  • DOI: https://doi.org/10.1023/A:1015600423981

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