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Toward 28Si through Trichlorosilane1

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Inorganic Materials Aims and scope

Abstract

Trichlorosilane was centrifuged to obtain a product with a 28Si abundance of 99.9%.

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REFERENCES

  1. Capinski, W.S., Maris, H.J., Bauser, E., et al., Thermal Conductivity of Isotopically Enriched Silicon, Appl.Phys. Lett., 1997, vol. 71, no. 15, pp. 2109-2111.

    Google Scholar 

  2. Ruf, T., Henn, R.W., Asen-Palmer, M., et al., ThermalConductivity of Isotopically Enriched Silicon, Solid State Commun., 2000, vol. 115, no. 5, pp. 243-247.

    Google Scholar 

  3. Ozhogin, V.I., Inyushkin, A.V., Taldenkov, A.N., et al., Effect of Isotopic Composition on the Thermal Conductivity of Germanium Crystals, Pis'ma Zh. Eksp. Teor.Fiz., 1996, vol. 63, no. 6, pp. 463-467.

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Babichev, A.P., Zhernova, Z.Y., Kurochkin, A.V. et al. Toward 28Si through Trichlorosilane1 . Inorganic Materials 38, 425–426 (2002). https://doi.org/10.1023/A:1015498300512

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  • DOI: https://doi.org/10.1023/A:1015498300512

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