Abstract
Trichlorosilane was centrifuged to obtain a product with a 28Si abundance of 99.9%.
Similar content being viewed by others
REFERENCES
Capinski, W.S., Maris, H.J., Bauser, E., et al., Thermal Conductivity of Isotopically Enriched Silicon, Appl.Phys. Lett., 1997, vol. 71, no. 15, pp. 2109-2111.
Ruf, T., Henn, R.W., Asen-Palmer, M., et al., ThermalConductivity of Isotopically Enriched Silicon, Solid State Commun., 2000, vol. 115, no. 5, pp. 243-247.
Ozhogin, V.I., Inyushkin, A.V., Taldenkov, A.N., et al., Effect of Isotopic Composition on the Thermal Conductivity of Germanium Crystals, Pis'ma Zh. Eksp. Teor.Fiz., 1996, vol. 63, no. 6, pp. 463-467.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Babichev, A.P., Zhernova, Z.Y., Kurochkin, A.V. et al. Toward 28Si through Trichlorosilane1 . Inorganic Materials 38, 425–426 (2002). https://doi.org/10.1023/A:1015498300512
Issue Date:
DOI: https://doi.org/10.1023/A:1015498300512