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Characteristics of a Glow Discharge in a Krypton/Elegas/Air Mixture

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Journal of Applied Spectroscopy Aims and scope

Abstract

The longitudinal glow discharge in the Kr/SF6/air mixture at a pressure of P = 0.7–6.0 kPa has been investigated. The electric characteristics and plasma radiation in the spectral region 150–340 nm are studied. The optimization of the radiation brightness (power) at λ = 249 nm in the KrF(BX) mixture and in the nitrogen bands is carried out depending on the working‐medium composition and current magnitude. It is shown that a d.c. discharge in the Kr/SF6/(N2:O2) mixture can be used in the multiwave UV–VUV radiation source on a system of the KrF and N2 molecular bands.

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Correspondence to A. K. Shuaibov.

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Shuaibov, A.K., Shevera, I.V. Characteristics of a Glow Discharge in a Krypton/Elegas/Air Mixture. Journal of Applied Spectroscopy 69, 130–133 (2002). https://doi.org/10.1023/A:1015336430998

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  • DOI: https://doi.org/10.1023/A:1015336430998

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