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Using Laser Scattering for Detection of Cracks on a Microsolderball Surface

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Abstract

In this paper, a scanning laser probe has been developed to detect and measure cracks on a microsolderball surface. The technique, based on a light-scattering method that employs a low-power He-Ne laser and conventional optical components, enables the laser beam to be focused on the test surface. In the relative scanning between the test surface and laser probe, the specularly reflected light intensity acquired by a photodiode would exhibit the change of the scattered-light intensity, which can be used to determine the size of cracks on the solderball. Proof-of-concept experiments have been performed with measurement of cracks of different sizes (from 4 μm to 60 μm) on the microsolderball.

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REFERENCES

  1. P. Sandland, Automated defect inspection: past, present & future, Proc. SPIE, 3332:296-308 (1998).

    Google Scholar 

  2. G. Jesse and H. Allen, Small component soldering process factors, Proceedings of the Technical Program-National Electronic Packaging & Production Conference, 2:949-954 (1999).

    Google Scholar 

  3. S. Gomez, K. Hale, J. Burrows, and B. Griffiths, Measurements of surface defects on the optical components, Meas. Sci. Technol., 9:607-616 (1998).

    Google Scholar 

  4. L. R. Baker, Microscope image comparator, Optica Acta., 31:611-614 (1984).

    Google Scholar 

  5. J. Lorincik, D. Marton, R. L. King, and J. Fine, Scanning scattering microscope for surface microtopography and defect imaging, Journal of Vacuum Science & Technology B., 14:2417-2423 (1996).

    Google Scholar 

  6. K. Takami, Defect inspection of wafers by laser scattering, Materials Science & Technology B., 44:181-187 (1997).

    Google Scholar 

  7. G. J. Dixon, Light scattering maps surface imperfections, Laser Focus World, 34:89-93 (1998).

    Google Scholar 

  8. C. Chinnock, Laser-based systems easily find semiconductor defects, Laser Focus World, 30:59-63 (1990).

    Google Scholar 

  9. M. Nozoe, A. Sugimoto, and T. Ikeda, Advanced surface inspection techniques for SOI wafers, Proc. SPIE., 332:488-492 (1998).

    Google Scholar 

  10. M. Miller, R. S. Lakes, and S. Conner, Optical testing of hard disks, Opt. & Las. Technol., 28:151-156 (1996).

    Google Scholar 

  11. J. C. Stover, Optical Scattering Measurements and Analysis (McGraw-Hill, New York, 1990).

    Google Scholar 

  12. S. H. Wang, C. G. Quan, C. J. Tay, and H. M. Shang, Surface roughness measurement in the submicrometer range using laser scattering, Opt. Eng., 39:1597-1601 (2000).

    Google Scholar 

  13. S. H. Wang, C. J. Tay, C. Quan, H. M. Shang, and Z. F. Zhou, Laser integrated measurement of surface roughness and micro-displacement, Meas. Sci. Technol., 11:454-458 (2000).

    Google Scholar 

  14. K. C. Fan, C. Y. Lin, and L. H. Shyu, The development of a low-cost focusing probe for profile measurement, Meas, Sci. Technol., 11:N1-N7 (2000).

    Google Scholar 

  15. W. J. Smith, Modern Optical Engineering: The Design of Optical Systems (McGraw-Hill, New York, 1990).

    Google Scholar 

  16. R. C. Gonzalez and R. E. Woods, Digital Image Processing (Addison-Wesley, Reading, MA, 1992).

    Google Scholar 

  17. Z. Zhang and P. J. Bryanston-Cross, Detection of a random edge and its application to interior surface measurement, Proc. SPIE, 2874:214-222 (1996).

    Google Scholar 

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Wang, S.H., Quan, C., Tay, C.J. et al. Using Laser Scattering for Detection of Cracks on a Microsolderball Surface. Journal of Nondestructive Evaluation 20, 145–151 (2001). https://doi.org/10.1023/A:1014765208723

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  • DOI: https://doi.org/10.1023/A:1014765208723

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