Abstract
A Taguchi orthogonal array design was implemented to optimize the experimental conditions for the preparation of a thin strontium titanate film on a Ti substrate using a hydrothermal process. The effects of such preparatory conditions as the strontium-concentration, pH-value, reaction temperature, reaction time and the substrate surface treatment were systematically studied. Results indicate that the effects of the reaction temperature and reaction time are the key variables influencing the relative crystal intensity (intensity of (110) SrTiO3 peaks in XRD spectrum/intensity of (101) Ti peak in XRD spectrum) of the films obtained. By combining the optimal settings of the two most influential process variables, a polycrystalline, SrTiO3-films was obtained, with improved crystallinity and a grain size of 0.2–0.4 μm and a dielectric constant of 360 at I MHz.
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References
R. WU and W. A. SCHULZE, J. Amer. Ceram. Soc. 75 (1992) 3390.
B. T. CHANG, Solid State Comm. 43 (1982) 335.
G. ARIT and D. HENNINGS, J. Appl. Phys. 58 (1985) 1619.
C. F. KAO and W. D. YANG, Mater. Transaction JIM 37 (1996) 142.
Y. C. YEH and T. Y. TSENG, J. Mater. Sci. Lett. 7 (1988) 766.
Y. NAKANO, M. WATANABE and T. TAKAHASHI, J. App. Phys. 70 (1991) 1539.
D. ROY, C. J. PENG and S. B. KRUPANIDHI, Appl. Phys. Lett. 60 (1992) 2478.
T. SAKUMA, S. YAMAMICHI, S. MATSUBARA, H. YAMAGUCHI and Y. MIYASAKA, ibid. 57 (1990) 2431.
W. B. PENNEBAKER, IBM J. Res. Dev. 13 (1985) 686.
S. YAMAMICHI, T. SAKUMA, K. TAKEMURA and Y. MIYASAKA, Jpn. J. Appl. Phys. 30 (1991) 2193.
H. MORI and H. ISHIWARA, ibid. 30 (1991) L1415.
T. HIRANO, T. FUJI, K. FUJINO, K. SAKUTA and T. KOBAYASHI, ibid. 31 (1992) L511.
F. M. PONTES, E. J. H. LEE, E. R. LEITE, E. LONGO and J. A. VARELA, J. Mater. Sci. 35 (2000) 4783.
P. C. JOSHI and S. B. KRUPANIDHI, Appl. Phys. Lett. 61 (1992) 1525.
J. V. MANTESE, A. L. MICHELI, A. H. HAMDI and R. W. VEST, MRS Bull. 10 (1989) 48.
G. BRAUNSTEIN and G. R. PAZ-PUJALT, Thin Solid Films 216 (1992) 1.
W. A. FEIL, B. W. WESSELS, L. M. TONGE and T. J. MARKS, J. Appl. Phys. 67 (1990) 3858.
M. YOSHIMURA, S. E. YOO, M. HAYASHI and N. ISHIZAWA, Jpn. J. Appl. Phys. 28 (1989) L2007.
S. E. YOO, M. HAYASHI, N. ISHIZAWA and M. YOSHIMURA, J. Amer. Ceram. Soc. 73 (1990) 2561.
N. ISHIZAWA, H. BANNO, M. HAYASHI, S. E. YOO and M. YOSHIMURA, Jpn. J. Appl. Phys. 29 (1990) 2467.
G. E. P. BOX, W. G. HUNTER and J. S. HUNTER, “Statistics for Experimenters An Introduction to Design, Data Analysis, and Model Building” (Wiley, New York, 1978) p. 510.
C. H. YANG, S. M. LIN and T. C. WEN, Polymer. Eng. and Sci. 36 (1994) 146.
M. W. WEISER and K. B. FONG, Amer. Ceram. Bull. 72 (1993) 87.
W. D. YANG and C. S. HSIEH, J. Mater. Res. 14 (1999) 3410.
TAGUCHI and GENICHI, “System of Experimental Design,” Vol. 1 and 2 (UNIPUB, New York and American Supplier Institute, Dearborn, MI, 1988).
M. WU, R. XU and S. H. FENG, J. Mater. Sci. 31 (1996) 6201.
M. I. DIAZ-GUEMES, T. G. CARRENO and C. J. SERNA, ibid. 24 (1989) 1011.
C. F. KAO and W. D. YANG, Material Science and Engineering B38 (1996) 127.
P. J. ROSE, “Taguchi Techniques for Quality Engineering,” 2nd ed. (McGraw-Hill, New York, 1996) p. 75.
G. E. P. BOX, W. G. HUNTER and J. S. HUNTER, “Statistics for Experimenters: An Introduction to Design, Data Analysis, and Model Building” (Wiley, New York, 1978), p. 630.
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Yang, WD., Hung, KM. Optimization of the experimental conditions for the preparation of a thin strontium titanate film by hydrothermal process. Journal of Materials Science 37, 1337–1342 (2002). https://doi.org/10.1023/A:1014560310260
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DOI: https://doi.org/10.1023/A:1014560310260