Skip to main content
Log in

Carrier compensation behaviors in Si-doped Al x Ga1−x As epilayers due to thermal annealing

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. J. Qiu, J. M. Depuydt, H. Cheng and M. A. Haase, Appl. Phys. Lett. 59 (1991) 2992.

    Google Scholar 

  2. E. Kurtz, S. Einfeldt, J. MÜrnberger, S. Zerlauth, D. Hommel and G. Landwehr, Phys. Status Solidi 187 (1995) 393.

    Google Scholar 

  3. Y. Sasajima and M. Hata, Appl. Phys. Lett. 75 (1992) 2596.

    Google Scholar 

  4. P. Mei, H. W. Yoou, T. Venkatesan, S. A. Schwarz and J. P. Harbison, ibid. 50 (1987) 1823.

    Google Scholar 

  5. L. Pavesi, N. H. Ky, J. D. Ganiere, F. K. Reinhart, N. Baba-Ali, I. Harrison, B. Tuck and M. Henini, J. Appl. Phys. 71 (1992) 2225.

    Google Scholar 

  6. K. J. Beernink, R. L. Thornton, G. B. Anderson and M. A. Emanuel, Appl. Phys. Lett. 66 (1995) 2522.

    Google Scholar 

  7. J. W. Chen, D. G. Ebling, R. Geppert, R. Irsigler, Th. Schmid, M. Rogalla, J. Ludwig and K. Runge, ibid. 70 (1997) 2693.

    Google Scholar 

  8. J. Maguire, R. Murray, R. C. Newman, R. B. Beall and J. J. Harri, ibid. 50 (1987) 516.

    Google Scholar 

  9. C. I. Harrison, B. Monemar, H. Kalt and K. Koehler, Phys. Rev. B 48 (1993) 4687.

    Google Scholar 

  10. R. C. Newman, Semicond. Sci. Technol. 9 (1994) 1749.

    Google Scholar 

  11. C. Domeke, Ph. Ebert, M. Heinrich and K. Urban, Phys. Rev. B 54 (1996) 10288.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lee, H.G., Kang, T.W. & Kim, T.W. Carrier compensation behaviors in Si-doped Al x Ga1−x As epilayers due to thermal annealing. Journal of Materials Science Letters 21, 49–51 (2002). https://doi.org/10.1023/A:1014290527676

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1014290527676

Keywords

Navigation