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Electrical studies on amorphous silicon carbide nitride films

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Journal of Materials Science Letters

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Authors and Affiliations

  1. School of Electrical Engineering and Computer Science, University of Central Florida, Orlando, FL, 32816-2450, USA

    Z. Alizadeh & K. B. Sundaram

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  1. Z. Alizadeh
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  2. K. B. Sundaram
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Alizadeh, Z., Sundaram, K.B. Electrical studies on amorphous silicon carbide nitride films. Journal of Materials Science Letters 21, 7–8 (2002). https://doi.org/10.1023/A:1014217906295

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  • DOI: https://doi.org/10.1023/A:1014217906295

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