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Technological Methods of Manufacturing the Sensitive Elements of Microsensors

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Measurement Techniques Aims and scope

Abstract

Different technologies for manufacturing the sensitive elements of microsensors which increase their metrological parameters are considered.

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References

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Authors
  1. É. L. Egiazaryan
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Egiazaryan, É.L. Technological Methods of Manufacturing the Sensitive Elements of Microsensors. Measurement Techniques 44, 728–733 (2001). https://doi.org/10.1023/A:1012547302805

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  • DOI: https://doi.org/10.1023/A:1012547302805

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