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Microelectronic Accelerometer with Lateral Compensation

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Measurement Techniques Aims and scope

Abstract

This article examines different accelerometers and compensation methods for them. It is determined that microelectronic accelerometers (micro-accelerometers) provide for the highest degree of compensation.

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Authors
  1. É. L. Egiazaryan
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Egiazaryan, É.L. Microelectronic Accelerometer with Lateral Compensation. Measurement Techniques 44, 488–493 (2001). https://doi.org/10.1023/A:1012358203248

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  • DOI: https://doi.org/10.1023/A:1012358203248

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