Skip to main content
Log in

Incorporation of nitrogen in diamond by using a modulated growth technique

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. J. ROBERTSON, J. Vac. Sci. Technol. B17 (1999) 659.

    Google Scholar 

  2. M. HOIKINS, E. R. WEBER, M. L. LAUNDSTRASS, M. A. PLANO, S. HAN and D. R. KANIA, Appl. Phys. Lett. 59 (1991) 1871.

    Google Scholar 

  3. M. W. GEIS, J. C. TWICHELL AND T. M. LYSZCARZ, J. VAC. SCI. TECHNOL. B14 (1996) 2060.

  4. K. OKANO, A. HIRAKI, T. YAMADA, S. KOIZUMI and J. ITOH, Ultramicroscopy 73 (1998) 43.

    Google Scholar 

  5. S. BOH, R. HAUBNER and B. LUX, Appl. Phys. Lett. 68 (1996) 1075.

    Google Scholar 

  6. M. PARK, A. T. SOWERS, C. LIZZUI, RINNIE, L. BERGMAN, R. J. NEMANICH, Z. SITAR, J. J. HREN, J. J. CUOMO, V. V. ZHIRNOV and W. B. CHOI, J. Vac. Sci. Technol. B17 (1999) 734.

    Google Scholar 

  7. K. OKANO, S. KOIZUMI, S. RAVI, P. SILVA and G. A. J. AMARATUNGA, Nature 381 (1996) 140.

    Google Scholar 

  8. N. JIANG, A. HATTA and T. ITO, Jpn. J. Appl. Phys. 37 (1998) L1175.

    Google Scholar 

  9. S. YUGO, T. KANAI, T. KIMURA and T. MUTO, Appl. Phys. Lett. 58 (1991) 1036.

    Google Scholar 

  10. M.-C. KWEON, H.-J. BARK and B.-K. CHOI, J. Kor. Vac. Soc. 7 (1998) 94.

    Google Scholar 

  11. C. J. AMMERLAAN, Inst. Phys. Conf. Ser. 59 (1981) 81.

    Google Scholar 

  12. S. JIN and T. D. MOUSTAKAS, Appl. Phys. Lett. 65 (1994) 403.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Hongjun Bark.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kweon, MC., Lee, SH., Kim, EM. et al. Incorporation of nitrogen in diamond by using a modulated growth technique. Journal of Materials Science Letters 20, 469–471 (2001). https://doi.org/10.1023/A:1010927212778

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1010927212778

Keywords

Navigation