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Sputtering and reactive ion etching damage to the Pt/Pb(Zr,Ti)O3/Pt thin film capacitors

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Materials Engineering, Chosun University, Kwangju, 501-759, Korea

    Eun Gu Lee

  2. Department of Metallurgical Engineering, Kookmin University, Seoul, 136-702, Korea

    Jae Gab Lee

  3. Advanced Nuclear Materials Development Team, Korea Atomic Energy Research Institute, Taejeon, 305-600, Korea

    Sun Jae Kim

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  1. Eun Gu Lee
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  2. Jae Gab Lee
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  3. Sun Jae Kim
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Lee, E.G., Lee, J.G. & Kim, S.J. Sputtering and reactive ion etching damage to the Pt/Pb(Zr,Ti)O3/Pt thin film capacitors. Journal of Materials Science Letters 20, 769–772 (2001). https://doi.org/10.1023/A:1010904301577

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