Skip to main content
Log in

Preparation of ZnO films from Zn2+ aqueous mist using atmospheric pressure glow plasma

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. M. KONUMA, “Film Deposition by Plasma Techniques” (Springer-Verlag, Berlin, 1992).

    Google Scholar 

  2. K. KURIHARA, S. ENDO, G. SASAKI, M. KAWARADA and N. KOSHINO, Appl. Phys. Lett. 52 (1988) 52.

    Google Scholar 

  3. O. SAKURAI, K. KUMAGAI, N. KIDA, A. OBURA, K. SHINOZAKI and N. MIZUTANI, J. Ceramic Soc. Jpn. 101 (1993) 1423.

    Google Scholar 

  4. T. YOKOYAMA, M. KOGOMA, T. MORIWAKI and S. OKAZAKI, J. Phys. D: Appl. Phys. 23 (1990) 1125.

    Google Scholar 

  5. K. CHAUDHARY, S. YAMADA, K. INOMATA, A. TAKANO, M. YOSHIMOTO and H. KOINUMA, Rep. Res. Lab. Eng. Mater. 17 (1992) 163.

    Google Scholar 

  6. K. INOMATA, H.-K. HA, K. CHAUDHARY and H. KOINUMA, Appl. Phys. Lett. 64 (1994) 46.

    Google Scholar 

  7. H.-K. HA, M. YOSHIMOTO and H. KOINUMA, ibid. 68 (1996) 2965.

    Google Scholar 

  8. T.-Q. LIU, O. SAKURAI and N. MIZUTANI, J. Mater. Sci. 21 (1968) 3698.

    Google Scholar 

  9. H. KOINUMA, H. OHKUBO, T. HASHIMOTO, K. INOMATA, T. SHIRAISHI, A. MIYANAGA and S. AYASHI, Appl. Phys. Lett. 60 (1992) 816.

    Google Scholar 

  10. B. CULLITY, “Elements of X-ray Diffraction” (Addison-Wesley, London, 1955).

    Google Scholar 

  11. K. KAMATA, J. NISHINO, S. OHSHUO, K. MARUYAMA and M. OHTUKI, J.Amer. Ceram. Soc. 77 (1994) 505.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Maruyama, K., Tsumagari, I., Kanezawa, M. et al. Preparation of ZnO films from Zn2+ aqueous mist using atmospheric pressure glow plasma. Journal of Materials Science Letters 20, 481–484 (2001). https://doi.org/10.1023/A:1010901303209

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1010901303209

Keywords

Navigation