Skip to main content
SpringerLink
Log in

Hybrid Integration Between Long Focus Microlens Array and IR Detector Array

  • Published:
International Journal of Infrared and Millimeter Waves Aims and scope Submit manuscript

Abstract

A special method, named step simulation method, is proposed for fabricating Si microlens array to improve the performance of infrared focal plane array (IR FPA). The focus length of rectangle-based multistep microlens array with element dimension of 40 µm×30 µm is 885.4 µm by the method, which is much longer than the focus length of microlens array fabricated by conventional Fresnel binary optics technique., The large-scale 256×256 element microlens array is hybridintegrated with the PtSi Schottky-barrier IR FPA by optical adhesive. The test results show that diffractive spot size of the microlens is 17 µm×15 µm and the average optical response of the IR FPA is increased by a factor of 2.4.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Dante D'Amato, and Robert Centamore, Proc. SPIE, 1544(1991):166-177.

    Google Scholar 

  2. Z.D. Popovic, R.A. sprague, and G.A.N. Connell, Applied Optics, 7(1998):1281-1284.

    Google Scholar 

  3. Yi Li, Xinjian Yi, Liping Cai, Sihai Chen, and Sixiang Chen, 25th International Conference on Infrared and Millimeter Waves. (2000):141-142.

  4. Michael R. Wang, and Heng Su, Optics Letters, 23(1998):876-878.

    Google Scholar 

  5. Xinjian Yi, Xinyu Zhang, Yi Li, and Xinrong Zhao, Proc. SPIE, 3276(1998):249-253

    Google Scholar 

  6. Chen Sihai, Yi Xinjian, Li Yi, He Miao, and Kong Lingbing, Proc. SPIE. 224, (2000):170-173.

    Google Scholar 

  7. Chen Sihai, Yi Xinjian, He Miao, and Zhang Xinyu, 25th International Conference on Infrared and Millimeter Waves. (2000):147-148.

  8. M. Edward Motamedi, William E. Tennant, HalukO. Sankur, et al., Optical Engineering, 36 (1997):1374-1381.

    Google Scholar 

  9. Zhang Xinyu, Yi Xinjian, He Miao, et al., Proc. SPIE, 3551(1998):191-198.

    Google Scholar 

  10. Yi Li, Yi Xinjian, and Cai Liping, International Journal of Infrared and Millimeter Waves,21 (2000): 1417-1425

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Optoelectronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    Sihai Chen, Xinjian Yi, Yi Li, Miao He, Lingbin Kong & Hong Ma

Authors
  1. Sihai Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Xinjian Yi
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yi Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Miao He
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Lingbin Kong
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Hong Ma
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Chen, S., Yi, X., Li, Y. et al. Hybrid Integration Between Long Focus Microlens Array and IR Detector Array. International Journal of Infrared and Millimeter Waves 22, 393–398 (2001). https://doi.org/10.1023/A:1010737521182

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1010737521182

Search

Navigation