Skip to main content
SpringerLink
Log in

Instrumental neutron activation analysis of silicon wafers using the silicon matrix as the comparator

  • Published:
Journal of Radioanalytical and Nuclear Chemistry Aims and scope Submit manuscript

Abstract

For the instrumental neutron activation analysis of trace impurities in high purity silicon wafer, a modified single comparator method has been applied. The energy distribution of the neutrons at the irradiation position was measured using the two flux monitors, Au and Co, and elemental contents were calculated using the silicon matrix in the wafer as a comparator. This has advantage of reducing the cross contamination from an external monitor during sample preparation and irradiation, the uncertainties from the non-homogeneity of the neutron flux and the error on the weight of comparators. Determination limits for 49 elements were presented under the condition of 72 hours irradiation at a neutron flux of 3.7·1013 n·cm-2·s-1 and 4000 s measurement. The analytical results obtained by this method and the conventional single comparator method were compared and were found to agree well within 5%.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J. A. Keenan, B. E. Gnode, J. B. White, J. Electrochem. Soc., 132 (1985) 2232.

    Google Scholar 

  2. M. L. Verheijke, J. J. J. Aspers, J. M. G. Hassen, J. Radioanal. Nucl. Chem., 131 (1989) 197.

    Google Scholar 

  3. I. Vaenskae, R. J. Rosenberg, V. Pitkaenen, Nucl. Instrum. Meth., 213 (1983) 343.

    Google Scholar 

  4. E. L. Lakomaa, P. Manninen, R. J. Rosenberg, R. Ziliacus, J. Radioanal. Nucl. Chem., 168 (1993) 357.

    Google Scholar 

  5. M. L. Boettger, D. Birnstein, W. Herbig, S. Niese, J. Radioanal. Nucl. Chem., 130 (1989) 417.

    Google Scholar 

  6. A. Huber, G. Boehm, S. Pahike, J. Radioanal. Nucl. Chem., 169 (1993) 93.

    Google Scholar 

  7. G. Boehm, J. I. Kim, Nucl. Instrum. Meth., A305 (1991) 587.

    Google Scholar 

  8. A. R. Smith, R. J. McDonald, H. Manini, D. L. Hurley, E. B. Norman, C. Valla, R. W. Odom, J. Electrochem. Soc., 143 (1996) 339.

    Google Scholar 

  9. M. Franek, V. Krivan, Anal. Chim. Acta, 274 (1993) 317.

    Google Scholar 

  10. K. Fujinaga, K. Kudo, J. Radioanal. Nucl. Chem., 62 (1981) 195.

    Google Scholar 

  11. K. S. Park, N. B. Kim, H. J. Woo, D. K. Kim, J. K. Kim, H. W. Choi, J. Radioanal. Nucl. Chem., 151 (1991) 373.

    Google Scholar 

  12. M. N. Schulepnikov, H. Rausch, J. Dubnack, D. Birnstein, S. Niese, J. Radioanal. Nucl. Chem., 122 (1988) 261.

    Google Scholar 

  13. K. W. W. Sims, E. S. Gladney, Anal. Chim. Acta, 251 (1991) 297.

    Google Scholar 

  14. E. W. Haas, R. Hofman, Solid State Electronics, 30 (1987) 329.

    Google Scholar 

  15. T. T. Akeuchi, Y. Nakano, T. Fukuda, I. Hirai, A. Osawa, N. Toyokura, J. Radioanal. Nucl. Chem., 216 (1997) 165.

    Google Scholar 

  16. J. I. Kim, G. Bpehm, R. Henkelmann, Fresenius J. Anal. Chem., 327 (1987) 495.

    Google Scholar 

  17. T. Takeuchi, Y. Nakano, T. Fukuda, I. Hirai, A. Osawa, N. Toyokura, J. Radioanal. Nucl. Chem., 168 (1993) 367.

    Google Scholar 

  18. K. Fujinaka, K. Kudo, J. Radioanal. Nucl. Chem., 52 (1979) 411.

    Google Scholar 

  19. N. B. Kim, K. S. Park, H. I. Bak, J. Korean Nuclear Soc., 18 (1986) 85.

    Google Scholar 

  20. K. S. Park, N. B. Kim, H. J. Woo, Y. Y. Yoon, K. Y. Lee, Biol. Trace Elem. Res., 26 (1990) 349.

    Google Scholar 

  21. K. S. Park, N. B. Kim, Y. S. Kim, K. Y. Lee, S. K. Chun, Y. Y. Yoon, J. H. Lee, J. Radioanal. Nucl. Chem., 192 (1995) 155.

    Google Scholar 

  22. K. S. Park, N. B. Kim, H. J. Woo, Y. Y. Yoon, S. K. Chun, J. Radioanal. Nucl. Chem., 168 (1993) 497.

    Google Scholar 

  23. N. B. Kim, H. J. Woo, K. Y. Lee, W. Hong, S. K. Chun, K. S. Park, Anal. Sci. Technol., 7 (1994) 477.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Earth Environmental Division, Korea Institute of Geology, Mining and Materials, 30 Gajung-dong, Yousong-gu, Taejon, 305-350, Korea

    N. B. Kim, H. W. Choi, S. K. Chun, S. Y. Cho & H. J. Woo

  2. Department of Chemistry, Kyungbook National University, Taegu, 702-701, Korea

    K. S. Park

Authors
  1. N. B. Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. H. W. Choi
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. K. Chun
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. S. Y. Cho
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. H. J. Woo
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. K. S. Park
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kim, N.B., Choi, H.W., Chun, S.K. et al. Instrumental neutron activation analysis of silicon wafers using the silicon matrix as the comparator. Journal of Radioanalytical and Nuclear Chemistry 248, 125–128 (2001). https://doi.org/10.1023/A:1010646613004

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1010646613004

Keywords

Search

Navigation