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Advanced Sensor Technology Based on Oxide Thin Film—MEMS Integration

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Abstract

Many of the most significant advances in achieving improved sensor performance have been tied to the integration of thin film oxides with micromachined and microelectronic technologies (MEMS). Arrays of microcantilever beams or microhotplates show great promise as chemical sensor platforms exhibiting enhanced selectivity and markedly reduced power dissipation. Microcantilever beams demonstrate exceptional sensitivity to chemical, thermal and other physical stimuli. Microhotplates, provide the opportunity to discriminate between chemical species by control of reaction rates. We review recent key developments in the micromachining of suitable structures, the means for incorporating active oxide films and the performance of individual and arrays of sensor devices.

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Authors and Affiliations

  1. Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA

    Harry L. Tuller

  2. Boston MicroSystems, Inc., Woburn, MA, 01801, USA

    Richard Mlcak

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  1. Harry L. Tuller
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  2. Richard Mlcak
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Tuller, H.L., Mlcak, R. Advanced Sensor Technology Based on Oxide Thin Film—MEMS Integration. Journal of Electroceramics 4, 415–425 (2000). https://doi.org/10.1023/A:1009916122253

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