Biomedical Microdevices

, Volume 2, Issue 3, pp 169–174 | Cite as

Focused Flow Micropump Using Ultrasonic Flexural Plate Waves

  • Audra H. Meng
  • Nam-Trung Nguyen
  • Richard M. White


In this paper, a micromachined pump is presented that uses ultrasonic flexural plate waves traveling along a thin membrane to excite an acoustic field in the fluid that is in contact with the membrane. The acoustic field generates fluid flow by the mechanism of acoustic streaming. A novel combination of radial transducers and unidirectional fluid flow produces a fluid micropump capable of achieving flow speeds up to 1.15 millimeters per second, much faster than flow speeds previously obtained. In addition, the radial transducers successfully focused 2-micron polystyrene spheres over a beam waist of less than 100 microns. Also presented are techniques used to characterize thipt>

ultrasonic flexural focused microfluidic micromachine 


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Copyright information

© Kluwer Academic Publishers 2000

Authors and Affiliations

  • Audra H. Meng
    • 1
  • Nam-Trung Nguyen
    • 1
  • Richard M. White
    • 1
  1. 1.Department of Electrical Engineering and Computer Science University of CaliforniaBerkeley Sensor & Actuator CenterBerkeley

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