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Microstructural and Spectroscopic Studies of Sol-Gel Derived Silica-Titania Waveguides

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Abstract

Silica-titania planar waveguides were prepared via the sol-gel method from acid-catalyzed solutions of firstly, ÿ-Glycidoxypropyltrimethoxysilane mixed with tetrapropylorthotitanate (labeled as GT), and secondly, ÿ-Glycidoxypropyltrimethoxysilane mixed with both tetrapropylorthotitanate and tetraethoxysilane (labeled as GTT). Atomic force microscopy, thermal gravimetric analysis, differential thermal analysis, UV-visible spectroscopy, Fourier transform infrared spectroscopy, and Raman spectroscopy were used to study the structural and optical properties of the waveguide films prepared from the two types of sols. The obtained results showed that in both cases, crack-free and highly transparent silica-titania films with a thickness of more than 0.5 μm could be obtained by a single spin-coating process after a heat treatment at 500°C. The GT derived films showed more shrinkage and a higher refractive index after annealing as compared to the GTT derived films. When such films were deposited on a silica-on-silicon substrate to act as a surface planar waveguide, the light propagation loss was measured to be about 0.9 dB/cm and 1.3 dB/cm respectively. Raman spectroscopy results indicated that the GTT derived waveguide films with 0.5 molar titanium content contained amorphous carbon phase after being heated at above 500°C in air directly.

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Authors and Affiliations

  1. School of Electrical & Electronic Engineering, Nanyang Technological University, Singapore, 639798

    Wenxiu Que, Y. Zhou, Y.L. Lam, Y.C. Chan, S.D. Cheng, Z. Sun & C.H. Kam

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  1. Wenxiu Que
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  2. Y. Zhou
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  3. Y.L. Lam
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  7. C.H. Kam
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Que, W., Zhou, Y., Lam, Y. et al. Microstructural and Spectroscopic Studies of Sol-Gel Derived Silica-Titania Waveguides. Journal of Sol-Gel Science and Technology 18, 77–83 (2000). https://doi.org/10.1023/A:1008797815331

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