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Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Inorganic Oxide Films

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Abstract

Structural changes stimulated by ultraviolet (UV) laser irradiations of sol-gel derived inorganic oxide films were investigated. Dried gel films of TiO2, Nb2O5, Ta2O5, SrTiO3 and Pb(Zr x Ti1−x )O3 (PZT) were found to be crystallized by the laser irradiation. On the other hand, the photo-induced change in gel films of BaTiO3, LiNbO3 and LiTaO3 was not observed although the laser beams were absorbed in the films. These sol-gel films were thermally crystallized at almost the same temperature around 600–700°C except TiO2. Thus, the UV-laser-induced crystallization is not directly ascribed to a simple thermal effect with the irradiation. Photochemical properties of the cations are assumed to be important for the change in sol-gel films.

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Asakuma, N., Fukui, T., Aizawa, M. et al. Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Inorganic Oxide Films. Journal of Sol-Gel Science and Technology 19, 333–336 (2000). https://doi.org/10.1023/A:1008789803938

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  • DOI: https://doi.org/10.1023/A:1008789803938

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