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The Influence of Porosity on the Electromechanical and Pyroelectric Properties of Ca-Modified PbTiO3 Thin Films

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Abstract

The properties of Pb1-xCaxTiO3 (x = 0–30) thin films for electromechanical and pyroelectric applications can be further improved if porous, low-dielectric constant layers are being used. The electric field dependent strain, piezoelectric coefficient, pyroelectric coefficient and the pyroelectric figure of merit were evaluated as a function of the Ca-content and relative density of the thin films. The heating-rate during the final anneal was observed to be the controlling parameter for the evolution of either dense or porous microstructures. Both 2-methoxyethanol and 1,3-propanediol based solution precursors were used for spin-coating platinized Si3N4/SiO2/Si wafers. Microstructure-property relationships and electrical properties concerning the domain mobility were examined.

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  1. Ceramics Laboratory, Materials Department, EPFL, Swiss Federal Institute of Technology, 1015, Lausanne, Switzerland

    Andreas Seifert

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  1. Andreas Seifert
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Seifert, A. The Influence of Porosity on the Electromechanical and Pyroelectric Properties of Ca-Modified PbTiO3 Thin Films. Journal of Sol-Gel Science and Technology 16, 13–20 (1999). https://doi.org/10.1023/A:1008752919139

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