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Textured PLCT Thin Films Prepared on Pt/Ti/SiO2/Si Substrate by Metal-Organic Decomposition

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Abstract

Textured calcium modified (Pb,La)TiO3 (PLCT) films were deposited on Pt/Ti/SiO2/Si substrates by using a metal-organic decomposition (MOD) process. The PLCT films exhibit good ferroelectric properties, a very low leakage current and a sharp PLCT/Pt interface. The (100) texture of the PLCT film is growth-controlled; the (100) oriented grains grow preferentially so as to minimize the surface energy. Particularly, the (100) preferred orientation is easy to form in the PLCT film with a layered structure for which the substrate almost does not affect the nucleation and growth of the film.

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Authors and Affiliations

  1. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai, 200050, China

    Zhitang Song, Chenglu Lin, Xiangrong Zhu & Xiaorong Fu

Authors
  1. Zhitang Song
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  2. Chenglu Lin
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  3. Xiangrong Zhu
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  4. Xiaorong Fu
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Song, Z., Lin, C., Zhu, X. et al. Textured PLCT Thin Films Prepared on Pt/Ti/SiO2/Si Substrate by Metal-Organic Decomposition. Journal of Sol-Gel Science and Technology 20, 51–60 (2001). https://doi.org/10.1023/A:1008724600779

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  • DOI: https://doi.org/10.1023/A:1008724600779

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