Abstract
Young's modulus and stress-optical coefficient of self-sustained gel film of CH3SiO3/2 were measured. Young's modulus varied from 1.1 to 1.5 GPa, depending on the structural state of the film. It increased with an increase in the degree of polymerization that was induced by heat treatments, and also increased with subsequent exposure to the ambient condition. The stress-optical coefficient was 6.3 × 10−12 Pa−1 for a sample treated at 120°C. The compliance of the film seems to depend mainly on the intermolecular structure of Si–CH3...CH3–Si as well as hydrogen bonding due to silanols and adsorbed water.
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References
A. Heller, M.V. Pishko, and E. Heller, U.S. Pat. No. 5616532, 1997.
M. Chikuni, T. Watanabe, M. Hayakawa, T. Kimura, A. Yamamoto, and H. Fujiki, U.S. Pat. No. 5786414, 1998.
Z. Zhang et al., U.S. Pat. Appl. No. 09/222299.
Matsuda, Y. Matsuno, M. Tatsumisago, and T. Minami, J. Am. Ceram. Soc. 81, 2849 (1998).
Z. Zhang, Y. Tanigami, R. Terai, and H. Wakabayashi, U.S. Pat. No. 5858280, 1999.
Z. Zhang, submitted for publication.
Z. Zhang, Langmuir 13, 273 (1997).
Z. Zhang, Y. Tanigami, H. Wakabayashi, and A. Konishi, in Proceedings of 18th International Congress on Glass (Am. Ceram. Soc., 1998).
C. Chiang, G. Neubauer, A.S. Mack, K. Yoshioka, G. Cuan, P.A. Flinn, and D.B. Fraser, Mat. Res. Soc. Symp. Proc. 265, 219 (1992).
N. Soga, J. Non-Cryst. Solids 52, 365 (1982).
Z. Zhang, H. Wkabayashi, and T. Arai, J. Sol-Gel Sci. Technol. 12, 153 (1998).
H. Ide (Ed.), Practical Encyclopedia of Plastics (Sangyo Chosakai, Tokyo, 1996), p. 29 (in Japanese).
H.G. Tomkins and P.W. Deal, J. Vac. Sci. Technol. B11, 727 (1993).
G. Carlotti and G. Socino, Appl. Phys. Lett. 66, 2682 (1995).
H. Nakao, in Handbook of Glass Engineering, edited by M. Yamane, I. Yasui, M. Wada, Y. Kokubun, R. Terai, K. Kondo, and S. Ogawa (Asakura Syoten, Tokyo, 1999), p. 380.
T. Watanabe, Y. Inoue, A. Kaneko, N. Ooba, and T. Kurihara, Electron. Lett. 33, 1547 (1997).
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Zhang, Z., Wakabayashi, H. Insight into Mechanical Properties of CH3SiO3/2 Film. Journal of Sol-Gel Science and Technology 19, 171–174 (2000). https://doi.org/10.1023/A:1008715700786
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DOI: https://doi.org/10.1023/A:1008715700786