Abstract
Ferroelectric SrBi2Ta2O9 film was prepared using the sol-gel technique. The sol-gel precursor resulted in good ferroelectric performance at annealing temperatures as low as 700°C. The baking profiles changed the orientation and the grain size in the film. The finer grain size and the higher switching charge were consistent under the slower baking profile.
Similar content being viewed by others
References
E.C. Subbarao, J. Phys. Chem. Solids 23, 665 (1962).
R.E. Neunham, R.W. Wolfe, and J.F. Dorrian, Mater. Res. Bull. 6, 1029 (1971).
C.A. Paz de Araujo, J.D. Cuchiaro, M.C. Scott, and L.D. McMillan, International Patent Publication, No. WO 93/12542, June 1993.
K. Okuwada, M. Imai, and K. Kakuno, Ceramic Transactions 22, 713 (1991).
K. Kato, C. Zheng, J.M. Finder, S.K. Day, and Y. Torii, J. Am. Ceram. Soc. 81(7) 1869 (1998).
I. Koiwa, Y. Okada, J. Mita, A. Hashimoto, and Y. Sawada, Jpn. J. Appl. Phys. 33, 5504 (1997).
S.D. Traynor, T.D. Hadnagy, and L. Kammerdiner, Integrated Ferroelectrics 16, 63 (1997).
T.D. Hadnagy, Integrated Ferroelectrics 18, 1 (1997).
K. Okuwada, S. Nakamura, M. Imai, and K. Kakuno, Jpn. J. Appl. Phys. 29(6), 1153 (1990).
K. Okuwada, M. Imai, and K. Kakuno, Jpn. J. Appl. Phys. 28(7), L1271 (1989).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Okuwada, K. Effects of Baking and Annealing Processes on SrBi2Ta2O9 Film by Sol-Gel Method. Journal of Sol-Gel Science and Technology 16, 77–81 (1999). https://doi.org/10.1023/A:1008713205027
Issue Date:
DOI: https://doi.org/10.1023/A:1008713205027