Preparation and Characterizations of TiO2/Organically Modified Silane Composite Materials Produced by the Sol-Gel Method

Abstract

TiO₂/organically modified silane (ORMOSIL) composite materials produced by the sol-gel method were studied for optical waveguide applications. High optical quality waveguiding films on different substrates, including silicon, gallium arsenide, silica/silicon substrates, and microscope glass slides, were prepared from high titanium content (0.2 molar) ÿ-glycidoxypropyltrimethoxysilane at low temperature. Scanning electron microscopy (SEM), atomic force microscopy (AFM), differential thermal analysis (DTA), thermal gravimetric analysis (TGA), Fourier transform infrared spectroscopy (FT-IR) and X-ray photoelectron spectroscopy (XPS) have been used to investigate the optical and structural properties of the composite films. The TGA/DTA results showed that the organic compounds in the film would tend to decompose in the temperature range from 200°C to 500°C. SEM and AFM results showed that a dense and porous-free composite material film could be obtained at the heat treatment temperature of 100°C. It was also shown that ORMOSIL is integrated in the glass, providing low shrinkage and high cracking resistance. The propagation loss properties of the composite films were also investigated. About 1.1 dB/cm propagation loss of the planar waveguide film was obtained at the wavelength of 633 nm.